基于PLZT光致形变特性的光控非接触式微镜驱动与控制研究

项目名称： 基于PLZT光致形变特性的光控非接触式微镜驱动与控制研究

项目编号： No.51205205

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 王新杰

作者单位： 南京理工大学

项目金额： 25万元

中文摘要： 针对目前微镜驱动方式存在的电磁噪声干扰等问题，本项目基于PLZT致动器具有的绿色驱动和直接驱动的特点，对微镜实施光控非接触式驱动与控制。通过对PLZT光致形变影响因素研究、迟滞分析，修正和完善光致伸缩数学模型；对三种构型PLZT致动器驱动机理进行研究，提出一种快速消除残余光致应变的方法；建立双晶片构型在双光源ON/OFF交替激励下的数学模型；并推导Rainbow构型在光照下的等效驱动力；基于PLZT致动器设计一种具有平移及旋转自由度的光控非接触式微镜驱动装置，并建立微镜在平移及旋转状态下的光电热力耦合数学模型；针对PLZT光致响应的非线性、迟滞性和复杂性，采用光源激励策略与控制算法相结合的方式，确定适合光控非接触式微镜驱动系统的控制策略，并利用仿真与实验验证该控制策略的有效性。本项目提供一种新型的微镜驱动方式，可完善PLZT的光致形变理论，推动PLZT在微驱动与智能结构领域的应用。

中文关键词： 光致形变；PLZT 致动器；光驱动；微镜；非接触控制

英文摘要： To solve the problem of electromagnetic interference of micro-mirror driven, the optical drive and non-contact control of the micro-mirror is studied based on the green drive and direct drive characteristic of PLZT actuator in this project. With influencing factor research and hysteresis analysis of photodeformation of PLZT, the photostrictive mathematical model is revised and improved. The driven mechanism of three configurations of PLZT actuator is studied. A method which can eliminate residual strain rapidly is presented for monilithic actuator. The mathematic model of bimorph actuator illuminated by two light sources with ON/OFF alternative actuation is established. The equivalent driving force of Rainbow actuator irradiated with light is deduced. The light-driven apparatus which has movement and rotation mode for micro-mirror is designed based on the PLZT actuators. The mathematic models with light-electric-temperature-elastic field coupling are established for the micro-mirror's movement and rotation mode. Suitable control scheme for the optical and non-contact drive system is obtained through combining the illumination method and the control algorithm, considering the nonlinear, hysteretic and complicated characteristic of photo-induced response of PLZT. The effect of control scheme is validated with simu

英文关键词： photodeformation；PLZT actuator；light-driven；micro-mirror；non-contact control