飞秒激光写入的光波导机理研究及其应用于海水盐度传感

项目名称： 飞秒激光写入的光波导机理研究及其应用于海水盐度传感

项目编号： No.11204054

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 物理学I

项目作者： 赵秀丽

作者单位： 哈尔滨工业大学

项目金额： 27万元

中文摘要： 本项目首先在硅基二氧化硅薄膜上制作平面光波导（PLC波导），然后在PLC波导中利用飞秒激光写入波导（作为传感臂），制作三维的MZI光波导，应用于海水盐度传感。本项目拟开展三个方面的工作：1. 利用拉曼光谱和原子力显微镜，研究飞秒激光对硅基二氧化硅薄膜分子的修饰作用，探讨飞秒激光写入波导的机理。2. 利用模式分析方法，分析飞秒写入波导截面不对称的原因；探索和控制飞秒激光写入波导的条件，制作出与PLC波导相匹配的低损耗写入波导。3.研究飞秒写入的传感臂的深度和间距对传感灵敏度的影响，设计和制作出高灵敏的三维MZI光波导传感器，海水盐度测量误差控制在±0.05%。通过本项目的实施，理解和掌握飞秒写入波导的机理，为新型三维光波导器件的开发提供指导意义。

中文关键词： 飞秒激光；光波导；传感器；折射率；盐度

英文摘要： Planar Light Circuits (PLC) waveguide will be fabricated in silicon-based silica film by using technology firstly. Then the sensing arm of MZI will be written by femtosecond (fs) laser to form 3D MZI structure optical waveguide,which will be used to sense salinity. Three projects will be carried out: 1. The Raman and Atomic Force Microscope will be used to study the effect of the fs laser on the the silicon-based silica molecules. And the physical mechanism of waveguide written by fs laser will be analyzed. 2. The optimized written conditions of optical waveguide in PLC waveguide by fs laser will be fully studied and investigated. By carefully controlling the writing parameters, we will fabricate the optical channel waveguide, whose mode fields will match to these of the PLC waveguide with low loss. By method of near field mode analysis and far filed mode matches, the reason of non-symmetric cross sections of the fs written waveguide will be analysed and field mode matche problesms will be solved. 3. The effect of depth and distance in the sensing arm written by fs laser on the salinity sensitivity will be studied in fabricated 3D MZI optical waveguide sensors. And the high sensitivity of 3D MZI optical waveguide salinity sensors will be fabricated.The salinity sensitivity of the sensor will target at meas

英文关键词： femtosecond laser；optical waveguide；optical sensor；the refractive index；salinity