基于随机方法的AFM探针实时定位与操作研究

项目名称： 基于随机方法的AFM探针实时定位与操作研究

项目编号： No.61305125

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 自动化技术、计算机技术

项目作者： 袁帅

作者单位： 沈阳建筑大学

项目金额： 27万元

中文摘要： 原子力显微镜（AFM）以其成像分辨率高、重复性好、可控性强的特点而成为纳米操作的首选工具，在微纳器件装配中得到广泛应用；然而经过近10年的发展，缺乏任务空间的精确定位能力以及单探针导致的非稳定操作等问题仍然没有得到很好解决，阻碍着AFM纳米操作的深入发展。针对上述问题，本申请将随机思想与路标观测相结合，在无精确传感器条件下实现探针的精确定位；同时开展基于并发操作的虚拟夹具技术研究，通过单根探针达到多探针的操作效果，解决单探针导致的非稳定性操作问题。主要研究内容包括：基于局部扫描的路标观测方法；基于概率思想的探针运动模型；虚拟夹具的理论分析与轨迹优化；并在理论研究基础上，通过建立基于CNT、ZnO的纳米检测传感器原型器件，验证理论方法在探针精确定位和稳定操作中的有效性和先进性，为AFM纳米自动化操作研究提供新的理论方法与途径。

中文关键词： 原子力显微镜；探针定位；随机方法；路标观测；虚拟夹具

英文摘要： The atomic force microscope (AFM) has become a preference tool with its high resolution, good repeatability and strong controllability. And it has been widely used in micro-nano device assembly. While it has been developed for about 10 years, the problems of lacking precise positioning in the task space and non-stable operation resulted from single probe are not well resolved yet, and hinders the in-depth development of the AFM nanomanipulation. As for these problems, this application combines the stochastic thoughts with landmark observation, and realizes the precise positioning of the probe without the precise sensor. Meanwhile the technique research of virtual clap based on simultaneous multiple operations is developed, by using single probe to achieve the operation effect of multi-probes, and the operation issues of non-stability caused by single probe is solved. The main research contents include the following: the landmark observation method based on the local scan; the probe movement model based on probabilistic thought; the theoretical analysis and trajectory optimization of virtual clap; the verification of the validity and the advancement of the theory method of the probe precise positioning and stable operation through establishing the CNT, ZnO-based nano-sensor prototype device, which provided new th

英文关键词： Atom Force Microscopy；Tip location；Stochastic approach；Landmark observation；Virtual clap