面向恶劣环境的蜂窝GaN纳米网基高性能氢气传感器研究

项目名称： 面向恶劣环境的蜂窝GaN纳米网基高性能氢气传感器研究

项目编号： No.61504084

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 钟爱华

作者单位： 深圳大学

项目金额： 21万元

中文摘要： 本课题面向物联网高性能传感器和恶劣环境下传感技术的重大需求，基于蜂窝氮化镓纳米网，开展适合恶劣环境下使用的高性能纳米氢气传感器基础研究。宽禁带半导体氮化镓耐高温、耐酸碱腐蚀，其纳米传感器表现出优异响应性能。然而目前技术很难操控纳米线和纳米管等分立纳米结构，很难通过简易工艺可控、批量制备纳米器件，成为纳米材料走向器件研究应用的瓶颈。针对上述问题，本课题提出用连续性的蜂窝氮化镓纳米网替代分立的纳米线，基于蜂窝氮化镓纳米网面内导电特性直接采用薄膜加工方法将其加工成纳米器件，极大的简化了纳米器件加工过程。基于蜂窝氮化镓纳米网，课题提出 FET(场效应晶体管)型和电容型纳米氢气传感器，重点研究二氧化硅、氮化硅、氧化镓绝缘插入层对氢气检测影响机理，纳米传感器优异响应特性机理，和氢气浓度量化数学表达式，为高性能纳米传感器的简易、可控、大批量制备提供理论指导和技术储备，加快高性能纳米传感器实用化进程。

中文关键词： 氢气传感器；MOS型气敏传感器；选择性；宽禁带半导体；恶劣环境

英文摘要： To meet the great needs of sensing technology for harsh environment and sensors for IOT (Internet of things), a high performance hydrogen sensor capable to work in harsh environment is proposed basing on a honeycomb GaN nanonetwork. As a wide band gap semiconductor, the GaN has high temperature resistance as well as chemical inertness, making it suitable to operate at harsh environment, and the sensors basing on nanostructures normally exhibit much enhanced sensing performance over corresponding films. However, the manipulation of separated nanostructures such as the nanowire and the nanotube is rather tough, leading to a difficulty of nano sensor fabrication, and becoming a bottleneck of their real world application. To solve this problem, an in-plane electrically conductive nanostructure namely honeycomb GaN nanonetwork is proposed to replace the separated GaN nanowire to make a nano hydrogen sensor. Because of its in-plane electrical conduction, nano sensor fabrication could be down using simple and controllable process. This project focus on the fundamental research of FET (Field Effect Transistor) type and capacitance type hydrogen sensor on the honeycomb GaN nanonetwork. The influence mechanism of the insulator insertion layer including the silicon dioxide, the silicon nitride, and the gallium oxide on the hydrogen sensing will be studied. Moreover, the mechanism of the enhanced performance of nano sensor will be investigated. With these efforts, a nano hydrogen sensor suitable for harsh environment with high sensitivity, fast response, low limit of detection,and high selectivity will be developed using simple and controllable process, paving the road of high performance nano sensor for real world application.

英文关键词： Hydrogen sensor;MOS type gas sensor;Selectivity;Wide Band Gap Semiconductor;Harsh environment