基于视觉引导散斑干涉微构件机械力学性能测量方法研究

项目名称： 基于视觉引导散斑干涉微构件机械力学性能测量方法研究

项目编号： No.51305120

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 王标

作者单位： 合肥工业大学

项目金额： 25万元

中文摘要： 随着微纳技术的迅速发展，微构件机械力学特性基础数据对MEMS 结构设计发展的影响越来越重。在构件力学特性测试中，需要对微纳结构进行加载夹持，并准确获知其应力应变对应关系。本项目将研究基于视觉引导散斑干涉微结构机械力学性能测量方法，包含微结构力学形变位移散斑测量方法和具有微力和微位移测量的微驱动定位、装夹及加载机构，能够测量微纳结构力学性能指标包括变形与应变、弹性模量、泊松比等参数。重点研究：1) 快速微构件夹持对中可视化引导方法，实现微纳结构按照测量关系夹持对中；2) 高精度位移及力传感单元与夹持驱动单元集成方法研究；3) 适用于光学显微散斑三维变形的力学性能评价方法；4) 集微梁弯曲法、拉伸加载法于一体的力学特性测量系统。通过本项目研究，建立适用于微纳机构力学特性测量方法雏形，为今后微纳力学特性的高准确度测量研究与开发提供研究基础。

中文关键词： 微构件；力学性能；拉伸弯曲；散斑干涉；可视化引导

英文摘要： By the rapid development of micro-nano technology, The influence of the basic data of micro-nano mechanics characteristics to MEMS structure design becomes more and more important. In the measurement of microstructure mechanics characteristics, it is necessary to clamp and load to microstructure, and to accurately acquire the corresponding relationship of stress-strain. The project will research the measurement method of microstructure mechanics characteristics based on visual navigation and speckle interferometry, which includes the speckle measurement method of micro-nano mechanic deformation and micro-nano driving and positioning, clamping and loading mechanics with the ability of measuring micro-force and micro-displacement. It can measure some microstructure mechanics characteristics, such as displacement, deformation, Elastic modulus, Poisson's ratio. The research of the project mainly focus on: 1) the quickly guide on the visualization method to micro-nano structure central clamping, it can realize the structure central clamping according to the measurement requirement; 2) the research of integrated method of high precision displacement and force sensing unit to clamping-driving unit;3)mechanics property evaluation methods for 3D deformation measurement based on optical speckle interferometry; 4)mechanics

英文关键词： micro-size structure；mechanic property；tensile and bending；speckle interferometry；visual navigation