阳极键合界面层力学行为的实验与分子模拟研究

项目名称： 阳极键合界面层力学行为的实验与分子模拟研究

项目编号： No.11272144

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 数理科学和化学

项目作者： 胡宇群

作者单位： 南京航空航天大学

项目金额： 78万元

中文摘要： 微纳机电系统器件在空天飞行等尖端领域有极重要的应用前景。阳极键合是实现此类器件3D结构集成制造的关键技术。本课题拟结合实验、分子模拟与理论，对微结构中阳极键合界面层的力学行为展开深入系统研究。实验上，基于某型微加速度计的典型键合结构，通过系统的阳极键合和力学实验，研究表面参数、结构参数，以及界面层处成分结构分布、纳米树状结构和分形结构等对键合界面层在静动态载荷下的力学行为的影响。分子模拟上，利用第一原理计算方法分析阳极键合界面处的金属氧化反应；利用分子动力学模拟方法分析键合界面处的扩散置限凝聚演化过程，获取目前实验手段无法获取的若干动态演化过程和原子细节。理论上，考虑静电力、表面力、残余应力等对键合界面处的粒子扩散置限凝聚与反应，以及对键合界面层形成的作用规律；结合实验和分子模拟结果，提出改进的力学分析模型。本项目旨在通过上述研究，为微纳机电系统器件的研发设计提供有益参考。

中文关键词： 阳极键合；微电子机械系统；枝状纳米结构；分形；分形维数

英文摘要： The MEMS/NEMS devices present an attractive prospect in many areas, especially in aviation and aerospace. Anodic bonding is one of the key technologies for the manufacturing of integrated 3-D structures of these devices. In this project, based on experiments, molecular simulation, and theoretical analysis, a systematic study will be made in depth for the mechanical behavior of anodically bonded interlayer within micro-scale structures. In accordance with a typical anodically bonded structure for one kind of MEMS micro accelerometer, with a series of anodic bonding and mechanical tests, for the behavior of the interlayer under static and dynamic loading, it will be studied what is the influence which comes from surface parameters, structural parameters, chemical composition distributed in the interlayer, dendritic nanostructures, and fractal patterns. The metal oxidation reaction, taking place at the bonding interface, will be analyzed with first-principles calculation method. The evolution of diffusion-limited aggregation (DLA) at the bonding interface will be analyzed with the molecular dynamics in order to obtain the dynamic evolution and atomic details which could not be acquired with experiments. For theoretical analysis, this project will study the mechanism of the influence from static electricity force, s

英文关键词： Anodic bonding；Micro-electro-mechanical systems；Dendritic nanostructures；Fractal；Fractal dimension