During the semiconductor manufacturing process, predicting the yield of the semiconductor is an important problem. Early detection of defective product production in the manufacturing process can save huge production cost. The data generated from the semiconductor manufacturing process have characteristics of highly non-normal distributions, complicated missing patterns and high missing rate, which complicate the prediction of the yield. We propose Dirichlet process - naive Bayes model (DPNB), a classification method based on the mixtures of Dirichlet process and naive Bayes model. Since the DPNB is based on the mixtures of Dirichlet process and learns the joint distribution of all variables involved, it can handle highly non-normal data and can make predictions for the test dataset with any missing patterns. The DPNB also performs well for high missing rates since it uses all information of observed components. Experiments on various real datasets including semiconductor manufacturing data show that the DPNB has better performance than MICE and MissForest in terms of predicting missing values as percentage of missing values increases.
翻译:在半导体制造过程中,预测半导体的产量是一个重要问题。在制造过程中早期发现有缺陷的产品生产可以节省巨大的生产成本。从半导体制造过程中生成的数据具有高度非正常分布、复杂的缺失模式和高缺失率的特点,使产量预测复杂化。我们提议了Drichlet工艺-天真贝ys模型(DPNB),这是一种基于Drichlet工艺混合物和天真巴耶斯模型的分类方法。由于DPNB基于Drichlet工艺混合物,并学习了所有相关变量的联合分布,它能够处理非常不正常的数据,并且能够以任何缺失的模式对测试数据集作出预测。DPNB还利用了所有观测到的部件的信息,因此在高缺失率方面表现良好。在包括半导体制造数据在内的各种真实数据集上进行的实验表明,DPNB在预测缺失值的百分比方面比MICE和MissForest在预测缺失值方面表现更好。