基于双衍射光栅外差干涉的高精度滚转角测量技术研究

项目名称： 基于双衍射光栅外差干涉的高精度滚转角测量技术研究

项目编号： No.61505213

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 汤善治

作者单位： 中国科学院高能物理研究所

项目金额： 20万元

中文摘要： 滚转角为导轨运动副及精密运动平台的关键参数。滚转角的测量为误差补偿、精度改善的提前和基础，是现代精密工程和先进制造技术中亟待解决的问题。与俯仰角和偏摆角不同，滚转角由于导轨运动方向与角位移所在平面的正交造成干涉仪、自准直仪等测角方法难以直接应用。本项目拟采用双衍射光栅位移技术解决正交问题，结合外差干涉测量技术进行角位移测量，由近似线性弧位移与半径几何关系求解待测量角度，形成一种基于衍射光栅外差干涉的滚转角测量方法。针对滚转角中心非恒定问题，提出双光栅的方案对角位移进行差动干涉测量，以提高稳定性。原理研究与理论分析，表明该方法具有高精度、技术可靠、简便易行等优点。建立相应的测试系统进行实验验证，完成误差分析与精度评价，为高精度滚转角测量提供一种途径，同时，为辅以光栅附件而增加滚转角测量功能，拓展现有商用激光干涉仪系统的应用提供理论依据和实践铺垫。

中文关键词： 光学测试；精密光学系统；传感测量

英文摘要： Roll angle is a key parameter for guide motion pair and precision displacement platform. Roll angle measurement is a basis of error compensation and accuracy improvement, which need to be urgently resolved for modern precision engineering and advanced manufacturing technology. Different from pitch or yaw angle, roll angle is difficult to be measured due to orthnogonality between the motion direction and the plane of angular displacement which makes the methods such as interferometer and autocollimator infeasible to be applied directly for roll angle test. This project adopts dual diffraction gratings for displacement measurement to deal with the orthnogonality problem, combines heterodyne interferometer to sense the angular displacement, calculates measurand roll angle accoding to the geometrical relationship of qusi-linear arc displacement and roll radius, and forms a method for roll angle measurement based on diffraction grating heterodyne interferometer. For variable or unknown of roll center point, we present a scheme of dual diffraction gratings to differential interferometer for the angular displacement in order to improve robustness. Principle and theoretical analysis reveal proposed method has merits of high accuracy, good stability, simple and practicable. Fabricating test system is employed to field test for experimental verification, and achieving error analysis and accuracy evaluation, which promise a effective way and approach for high accuracy roll angle mesurement. Moroover, the application prospect of commerical interferometer system will be extended by a dual-grating accessory like other test functions.

英文关键词： Optical testing;Precision optical system;Sensing measurement