新型复合式三维原子力显微镜成像理论与技术的基础研究

项目名称： 新型复合式三维原子力显微镜成像理论与技术的基础研究

项目编号： No.61204117

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 吴森

作者单位： 天津大学

项目金额： 26万元

中文摘要： 半导体工业的发展日益突出了对微电子结构三维关键尺寸的无损检测需求。三维原子力显微镜是满足此类需求的最具潜力的测量设备。近年来业内形成了分别基于Z轴倾斜技术和异形针尖技术的两种三维原子力显微镜实现方案，但二者各自有着测量效率不高以及存在扫描盲区等不足。本研究拟提出一种新的复合式三维原子力显微镜方案，以异形针尖完成对样品大部分表面的快速扫描，以Z轴倾斜方式完成对少量残留盲区的扫描，最终通过图像去卷积及拼接等技术重构出样品的完整形貌。具体的研究内容包括三个方面：1.开发一套复合式三维原子力显微镜样机并制订相应的复合式扫描策略；2.建立异形针尖的动力学模型并对其三维检测灵敏度进行全角度标定；3.基于形态学方法和图像处理技术消除针尖卷积效应，实现对样品真实三维形貌的拼接与重构。本项目的研究成果将为各类微结构和纳米材料提供新的真三维表征手段，并为相关仪器的开发提供理论支持与技术积累。

中文关键词： 三维原子力显微镜；扭转谐振；喇叭口针尖；重构；标定

英文摘要： The development of semiconductor industry brings an urgent requirement of nondestructive 3D metrology methods for critical dimensions of small line structures. 3D-AFM is believed to be the most potential technology to meet the needs. Recently, two kinds of 3D-AFMs based on Z-axis tilting and flared tip technology are devoloped，respectively. However, the way of Z-axis tilting is normaly low effciency and the flared tip is not able to reach some important region such as the boot of sidewalls. This study proposes a new hybrid 3D-AFM solution, in which the flared tip is used for fast scanning of the major surface of the sample with standard direction, and then the probe head is tilted to scan the regions which used to be unreachable. With image processing technique including deconvolution and stitching, the complete topography of the sample can be reconstructured. The research includes the following three issues: 1.Developing a hybrid 3D-AFM and the corresponding scanning strategy; 2.Modeling the mechanical behaviors of the flared tip integrated with the cantilever, and calibrating the omnibearing senstivity of the probe; 3.Eliminating the tip-convolution effects by morphological method, and reconstructing the entire 3D topography of the sample. This research contributes to the true 3D characterization of various mi

英文关键词： 3D-AFM；torsion resonance；flared-tip；reconstruction；calibration