光学介质薄膜与多体缺陷的复合光散射特性研究及特征分析

项目名称： 光学介质薄膜与多体缺陷的复合光散射特性研究及特征分析

项目编号： No.61308071

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 巩蕾

作者单位： 西安工业大学

项目金额： 25万元

中文摘要： 光学介质薄膜的质量直接影响着光学系统的整体性能。介质薄膜粗糙度和缺陷的检测与控制是光学薄膜及纳米/亚纳米结构材料制备、检测与性能等研究方向的重点研究内容之一。有效的提取光学介质薄膜粗糙度及缺陷特征，诊断、控制光学介质薄膜微观形貌结构，对提高光学系统的效率或纳米结构功能材料的性能具有重要的学术意义和应用价值。本项目基于光与材料相互作用的电磁理论，研究微粗糙膜系光学特性，以及介质薄膜与多体缺陷的复合光散射特性；研究膜系的物性参数及缺陷尺寸、形态、方位等特征参数对光学介质膜层和缺陷复合光散射空间分布、偏振特性的影响规律，分析缺陷和微粗糙介质薄膜的耦合场及各自对总场的贡献；通过表面粗糙度、折射率、消光系数以及散射光强度等实验测量，理论模型与实验结合，应用支持向量机优化理论提取缺陷的主要特征。为光学薄膜、半导体材料的制备、无损检测、微纳米结构的光学性能设计等领域提供理论依据和技术支撑。

中文关键词： 光学介质薄膜；多体缺陷；复合光散射；支持向量机；特征分析

英文摘要： The optical system performance is directly influenced by the optical dielectric film quality. The detection and control of the optical dielectric film roughness and defect particles is one of the most important research points about the preparation and check and as well as performance of the optical film and the nanometer/subnanometer structural material. Extracting effectively the optical dielectric film roughness and defect character and diagnosing and controlling the optical dielectric film character have important academic significance and realistic value to improve the optical system efficiency and increase the nanometer structure material performance.Based on the electromagnetic theory of the interaction between the light and the material, the optical character of the micro-rough dielectric film and the composite light scattering character between the optical dielectric film and multi-body defect particles are studied. The influence of the defect character parameters, i.e. the size and the shape and the azimuth of the defect, to the composite light scattering between the optical dielectric film and defect particles is researched and the contributions of the defect and the micro-rough dielectric film, respectively, to the total scattered field and the coupled field are analyzed. Measuring experimentally th

英文关键词： optical dielectric film；multi-body defect；composite scattering；SVM；distinction analysis