短相干激光干涉微球全表面形貌高精度检测方法研究

项目名称： 短相干激光干涉微球全表面形貌高精度检测方法研究

项目编号： No.61275096

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 刘国栋

作者单位： 哈尔滨工业大学

项目金额： 75万元

中文摘要： 微球在惯性约束聚变、微光学和精密机械等领域有着重要的应用，其表面微观形貌对其功能和特性有着重要的影响，而微球尤其是透明微球全表面形貌无遗漏检测是表面检测领域的难点。本文提出了一种新的干涉测量方法实现微球全表面高精度测量。采用短相干激光干涉消除杂散光对干涉场的影响；采用移相干涉技术，减小系统噪声的影响，提高信号处理精度；设计了一种新型针孔反射镜实现分波面干涉，减少了激光在光学元件中的传播环节，并采用单模光纤滤除激光杂模，提高了干涉光束质量；采用球冠扫描拼接实现微球全表面测量。重点研究短相干移相衍射干涉系统的结构、理论建模、高精度信号处理方法、扫描运动机构反馈控制方法、误差分析与补偿方法。检测指标：微球直径400μm-2000μm，垂直分辨率5nm，水平分辨率1μm。

中文关键词： 移相衍射干涉；微球检测；表面形貌检测；相位信息提取；偏心误差修正

英文摘要： Microballs are important parts in the region of inertial confinement fusion,micro-optics,precision machinery and so on.The surface roughness of microball influences its function and character greatly. However, the whole surface profiling of microball without point missing is very difficult in surface metrology field, especially for transparent microball. In this article, a new method of interferometry is presented to profile the whole surface of microball with high precision. The technology of low-coherence laser interferomety is adopted in this method to remove the influence of stray light. Phase-shifting interferometry is also utilized to reduce the influence of system noise and improve the precision of signal processing. A novel pin-hole mirror is designed to realize amplitude-wave interference and spare the light from transmiting in optical elements. Meanwhile, the random modes of the laser are filtered by single mode fiber to improve the laser quality. The whole surface of microball should be profiled by rotate scanning and patch splicing. The research would be focused on the structure and theoretical model of phase-shifting diffraction interferometry system with low-coherence, signal processing method with high precision, feedback scanning method, the method of error analysis and compensation, and so on.

英文关键词： phase shifting diffraction interferometer；micro-sphere inspection；surface topography inspection；extraction of phase information；correction of eccentricity errors