基于明暗场融合的大口径光学元件表面损伤检测关键技术研究

项目名称： 基于明暗场融合的大口径光学元件表面损伤检测关键技术研究

项目编号： No.61473293

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 自动化技术、计算机技术

项目作者： 张正涛

作者单位： 中国科学院自动化研究所

项目金额： 82万元

中文摘要： 随着科学研究和装备制造的需要，光学系统的有效口径越来越大，但由于加工过程不可避免的会留下各类损伤，这些损伤会对精密光学系统的性能产生严重影响，然而大范围下高精度损伤检测极其困难，近年来大口径光学元件表面损伤检测一直是研究的热点与难点。本项目以解决大口径光学元件表面损伤检测中的瓶颈问题与突破关键技术为目标，提出一种基于明暗场融合的大口径损伤检测原理样机，为提高系统在大数据量下损伤图像采集、处理、显示的实时性、多种元件检测的适应性与损伤标定的准确性，重点围绕以下几项关键技术开展研究：1)损伤检测装置结构设计与智能控制策略；2）损伤扫描路径规划方法与明暗场图像的数据匹配与融合；3）复杂条件下损伤分割与识别方法；4）明暗场融合下的损伤标定方法。本项目的研究成果对提高我国在光学元件加工与制造、大功率激光系统、半导体加工等领域的水平具有重要的意义，对我国科技和国防事业的发展具有重大的战略意义。

中文关键词： 大口径光学元件；损伤检测；明暗场成像；散射效应；轨迹规划

英文摘要： With the needs of scientific research and equipment manufacturing, the effective aperture of the optical element is growing larger and larger. However, the optical processing will leave all kinds of defects inevitably on the surface of the optical element. These defects may cause a serious impact on the performance of the fine optical system. But the precise detection of the defects in a large area is challenging. For recent years, the measurement of detects on the surface of the larger aperture optical element is a hot and difficult subject in this area. The research target of this project is to solve the bottleneck problem and to make breakthrough on key technologies for the measurement of the defects on the surface of the large aperture optical element. A prototype system is designed contains bright and dark field imaging systems for the detect measurement. In order to improve the real-time performance of the defect image capture, processing and display, the adaptability of a variety of optical element, the accuracy of calibration, the following key techniques are studied by this project: 1) structure design of the defect detection instrumentation and intelligent control strategy; 2) scanning trajectory planning method and image data matching and integration between bright and dark field imaging systems; 3) flaws recognition and classification algorithm under complex condition; 4) calibration algorithm based on the fusion of bright and dark field imaging systems; The results of the project will improve the capability in optical element processing and manufacturing, high power laser system, semiconductor processing in our country. It also has great strategic meaning for the development of science and technology and national defense.

英文关键词： large aperture optical element;defect detection;bright/dark-field imaging system;scattering effect;trajectory planning