双色双光子激光快速直写大规模特征尺寸<50nm纳米结构阵列关键技术研究

项目名称： 双色双光子激光快速直写大规模特征尺寸<50nm纳米结构阵列关键技术研究

项目编号： No.11504294

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 张琛

作者单位： 西北大学

项目金额： 23万元

中文摘要： 激光微纳加工技术打破了远场光刻过程中光学衍射极限限制，较传统光刻技术能获得更微小的特征尺寸（<100nm），且加工方式灵活多样，加工对象更加广阔。.然而，常用激光微纳加工技术在实现更高加工精度，特别是加工特征尺寸小于50nm结构、同时实现其大面积、高重复阵列的快速制备方面仍有许多不足。本课题立足当前激光纳米加工的热点问题，针对当前激光纳米加工在实现更高精度（<50nm）纳米阵列制备的难点问题，提出了一套基于双色双光子激光新型快速加工方法，进行高精度纳米结构阵列的大面积、高重复性、快速制备研究工作。课题首先通过对激光光束时空特性调制研究，获得覆盖面大、图形一致、精度高的激光点阵。在激光点阵的基础上双光子吸收机制激光超衍射纳米加工工作；进一步开展利用材料光聚合-光聚合抑制机制、结合双光子吸收机理在光刻中获得纳米量级的像素点。最后，利用扫描技术，实现双色双光子激光光刻大范围纳米结构的快速制作。

中文关键词： 纳米光刻；激光阵列；双光子吸收；光聚合抑制；微纳加工技术

英文摘要： Laser micro/nano fabrication technology is one of the most efficient method to break the diffraction limitation and implementing the structures with nano level feature size. The laser micro/nano fabrication is with the merits of manufacturing with higher precision (100nm), much flexible fabricating method and more processing substances. .However, there still lays some difficulties for acquiring a smaller feature size (especially the dimension below 50nm), and fast manufacturing of large-scale covered nano arrays with good repeatability. The proposing of this project is based on the leading edge of laser nano fabrication technology. A novel method, which is called two-color & two-photon fast laser fabrication technology, is proposed to obtaining a higher fabrication precision (<50nm) and fast implementing the large-are, consistent nano arrays. At first, a large range laser array will be created by beam spatio temporal modulation technique. The fabrication based on two-photon lithography with laser array will be experimental explored preliminarily; the photon polymerization-inhibition mechanism is combined with two-photon absorption to compress lithographing pixel to nano level. Finally, by applying the fast scanning technology the large range covering nano array will be implemented.

英文关键词： nano lithography;laser array;two -photon absorption;photon polymerization inhibition;micro/nano fabrication technology