面向14纳米及以下工艺的亚皮秒精度信号片上测量关键技术研究

项目名称： 面向14纳米及以下工艺的亚皮秒精度信号片上测量关键技术研究

项目编号： No.61474098

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 张培勇

作者单位： 浙江大学

项目金额： 76万元

中文摘要： 针对现有的纳米尺度CMOS工艺芯片内信号无法直接测量的问题，本项目拟研究一种新的亚皮秒采样间隔的片上检测电路，通过融合实时采样法和等效时间采样法，研究解决等效时间采样电路中控制信号和被测信号的抖动会对采样电路测量精度产生影响的问题。本研究拟采用相位内插和延时线混合的方法，实现多通道的亚皮秒分辨率控制信号的产生与传输。新的采样电路可实现亚皮秒级的测量精度，可以快速实测到以往的电学测量无法检测到的纳米尺度芯片内信号的亚皮秒分辨率波形，为纳米尺度工艺研究提供一个强有力的观测工具。本研究为纳米尺度高时间分辨率片上检测提供了一种全新、高效的检测方法，将对半导体新工艺的开发与成熟应用起到重要的推动作用。研究团队坚实的前期研究基础和多学科交叉的优势是本课题顺利开展和完成的保障。

中文关键词： 集成电路；工艺偏差；片上检测；纳米尺度

英文摘要： Signal on nano-scale CMOS chip cannot be measured directly. Aiming at this problem, a novel on-chip measure circuit with sub-picosecond sampling resolution is studied in this project, which combine the real-time sampling method and the equivalent time sampling method to address the impact of control signal and measured signal jitter on the equivalent time sampling circuit. Phase interpolation method and delay-line method are mixed in this study to achieve the generation and transmission of the multi-channel control signals with sub-picosecond resolution. The new sampling circuit can achieve sub-picosecond measurement resolution. It can quickly measure the sub-picosecond resolution waveforms of the nano-scale on-chip signals which are undetectable previously, and it also provides a powerful observation tools for the nano-scale process research. Our research provides a new and effective measure method for nano-scale on-chip high temporal resolution monitoring, which will be very helpful for the development and mature application of new semiconductor technology new process. The solid preliminary study foundation and interdisciplinary advantage of the research team is the guarantee to carry out and accomplish this project successfully.

英文关键词： Integrated circuit;process Variation;On-chip timing measurement;Nano-scale