成分梯度阀金属钝化膜高通量表征的椭偏法研究

项目名称： 成分梯度阀金属钝化膜高通量表征的椭偏法研究

项目编号： No.21303148

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 左娟

作者单位： 厦门理工学院

项目金额： 25万元

中文摘要： 阀金属是一类自行生长纳米多孔氧化膜的金属，表面钝化膜的形成显著的提高了其耐蚀性。金属的点蚀敏感性以及粘结力与其钝化膜的电子性质和介电性能等密切相关。本项目采用阳极氧化成分梯度分布的阀金属合金膜的方法制备多组分分布的钝化膜。拟采用微光斑椭偏技术研究该体系。发展一种基于耦合多样品法和微扰法的新的拟合方法，建立合适的物理模型，解析椭偏数据，得到成分梯度阀金属钝化膜的物理参量，揭示影响金属粘结和耐蚀性能的材料宏观介电函数、厚度和电子结构等因素。探明椭偏技术所测物理参量与钝化膜耐蚀性的关联性。本项目的开展，对探测阀金属合金钝化行为，揭示钝化膜耐蚀性有重要理论意义和实用价值。同时也能为寻找high-k材料提供实验依据和理论参考。

中文关键词： 高通量；阀金属；椭偏；成分梯度；钝化膜

英文摘要： Valve metals can self-grow nano-porous oxide film and the formation of passive films can improve its corrosion resistance. The sensitivity of metal pitting corrosion and adhesion force are closely related with the electronic and dielectic properties of their passive films.Multi-component passive films will be prepared by anodizing the component spread valve metals in this project.The spectroscopic ellipsometry with microspot will be performed to study this systems.A new method based on the coupling multi-sample and the perturbation method will be developed. A proper physical model will be established to fit elliposometric data and obtain the physical parameters of the component spread passive films and reveal the macroscopic dielectric function, which determines its non-covalent interactions, thickness, electrical properties which affect the adhesion and anti-corrosion properties. A correlation between physical parameters measured by spectroscopic ellipsometry and corrosion resistance of passive films. This project will help us to understand the passive behavior of valve metals， enhance the corrosion resistance of valve metals and look for high-k materials.

英文关键词： high-throughput；valve metal；ellipsometric spectroscopy；compositional spread；passive films