大行程纳米级精度多自由度运动系统的基础研究

项目名称： 大行程纳米级精度多自由度运动系统的基础研究

项目编号： No.91223201

项目类型： 重大研究计划

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 张宪民

作者单位： 华南理工大学

项目金额： 290万元

中文摘要： 本项目面向国家对纳米制造技术的重大需求，以光刻、纳米压印、纳米操作、纳米测量等典型纳米制造装备的共性基础问题为研究对象，首先研究新型大挠度精密柔性铰链的疲劳可靠性理论，在此基础上, 最优拓扑优化方法和伪刚体方法相结合,考虑机构的运动学和动力学特性，进一步研究新型大行程柔顺机构的设计理论和方法。研究新型压电驱动器的驱动机理、精度保持机制、微扰动响应规律，研制具有高位移分辨率、高位置保持能力的压电驱动器。通过研究多自由度精密运动系统的非线性动力学行为，揭示系统的微扰动和耦合机制，并进一步研究鲁棒性好、自适应能力强的控制方法。 大行程纳米级精度多自由度运动系统以其独特的优良性能和广泛的应用前景已成为了新的研究热点，在纳制造、精密测量等许多尖端领域具有广泛的应用前景。对这类系统内在机制和设计方法进行深入系统的研究具有重要的理论意义和应用价值。

中文关键词： 纳米制造装备；柔顺机构；非线性动力学；拓扑优化；驱动器

英文摘要： Aiming at the nation requirement of the nano-manufacturing technology, the fundamental problems of the multi-degree-of-Freedom (MDOF) macro/micro systems which are widely used in the nano-manufacturing instrument such as X-ray lithography, nano-imprint lithography, nano-manipulation, and nano-metrology, are as the research object. The fatigue and reliability theory of the large range motion flexure hinges will be studied first, then, combining the topology optimization method and the pseudo-rigid-body model method, considering kinematic and dynamic performances, the integrated design method for MDOF large range motion compliant mechanism will finally be developed. Other research items includes: the new actuating method and the accuracy holding theory, developing new actuators with high performance; revealing the rules of the micro-perturbation, coupling effect between the macro motion and the micro motion by nonlinear dynamic analysis of the MDOF system ; developing a control method with robust and adaptation for the system. MDOF systems with large range of motion and nano-accuracy positioning resolution are highly needed for industrial applications which is a hot research field. This kind of system with remarkable performance is widely used in the high-tech fields such as nano-manufacturing, nano-metrology

英文关键词： Nano-manufacturing instrument；Compliant mechanism；Nonlinear dynamics；Topology optimization；Actuator