应力场作用下调幅分解型合金薄膜沉积过程中微观组织演化的相场方法研究

项目名称： 应力场作用下调幅分解型合金薄膜沉积过程中微观组织演化的相场方法研究

项目编号： No.51301146

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 卢勇

作者单位： 厦门大学

项目金额： 26万元

中文摘要： 薄膜材料因其在电子、新能源和半导体等方面的广泛应用，对现代科技的发展有着举足轻重的作用。然而，对于应力场作用下，调幅分解型合金薄膜沉积过程中微观组织演化的特征以及自组装型多层薄膜的组织演变机理仍然缺乏深入和系统的解释，这已经成为多层薄膜设计与研发过程中亟待解决的问题。本项目基于前期的研究成果，巧妙地采用一层一层的沉积模式对薄膜沉积过程进行合理化近似，结合微弹性的相场方法与浓度场的耦合，拟解决一直以来薄膜生长过程研究和组织形态演化研究彼此分离的缺陷，建立应力场作用下薄膜沉积过程中微观组织演化的相场动力学模型，对应力场作用下调幅分解型合金薄膜沉积过程中的组织演变机理，以及薄膜表面扩散和不同特征的弹性性质对调幅分解型薄膜的微观组织演化的影响进行全面深入地研究。通过本项目的研究，可为薄膜的制备和工艺优化提供重要的理论参考，为新型自组装多层金属合金薄膜的开发提供理论借鉴。

中文关键词： 调幅分解；薄膜组织；相场法；组织控制；周期性结构

英文摘要： The multilayer films have played an significant role in the development of the modern science and technology because of the their widely applications in the industries, such as semiconductors, electronics, as well as the renewable energy industry. However, because few detailed and systematic investigation was carried out, there is littile basic understanding of the characteristics and microstructural evolution during film deposition process. As a consequence, the design and development of the multilayer films remain empirically. Based on our the previous research, the deposition process has been reasonably approximated by the model of layer-by-layer deposition. Therefore, the utilization of the same approch is suggested in the present project. Furthermore, by the coupling of the phase-field microelasticity theory, the phase field model are proposed for the microstructure evolution during film deposition under elastic field. Thus, the simulation can be carried out by the combination of the growth process and the microstructure evolution. The systematical investigation of the mechanisms can be performed for the microstructure volution during film deposition, by considering the effect of the surface diffusion and the different elastic property of the film and substrate. The project can provide important theory for

英文关键词： Spinodal decomposition；Microstructure of thin film；Phase-field method；Microstructure design；Periodic microstructure