面向恶劣环境的三维集成电容式多参数无源LTCC传感器敏感机理、制造及测试技术基础研究

项目名称： 面向恶劣环境的三维集成电容式多参数无源LTCC传感器敏感机理、制造及测试技术基础研究

项目编号： No.61471324

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 谭秋林

作者单位： 中北大学

项目金额： 88万元

中文摘要： 针对航空、航天、采矿及冶金等领域对高温、高旋恶劣环境下复合参数的原位测试需求，本项目创新性的提出一种基于LTCC技术的无线、无源多参数三维集成一体化电容式陶瓷传感器新结构，通过无源遥测读取传感器信号，实现600℃以上压力、温度和振动参数的单片同时测量。通过解决集成设计、兼容制造等过程中的一系列基础技术问题，探索基于耐高温陶瓷材料的多参数电容式敏感机理，探明高温对LTCC材料力学和电学性能的影响规律，为无线、无源陶瓷类传感器的信号获取及温度补偿方法提供理论基础；通过深入研究多敏感LC回路之间的电磁耦合关系，构建多参数遥测信号的解耦算法，解决多参数信号之间的耦合串扰问题；通过解决多层陶瓷基板/金属浆料和介质材料的烧结应力匹配控制问题，形成一套基于LTCC微组装技术的多敏感单元集成制造的工艺方法。最终研制出三维集成的无源传感器及测试系统原型，为恶劣环境下多功能无源传感器的发展提供参考方法。

中文关键词： 三维集成；LTCC微组装；多参数；无源微传感器；恶劣环境

英文摘要： For the demands of in-situ testing of multiple parameters under harsh environments of high temperature and high speed rotation in the fields of aviation, aerospace, mining and metallurgy etc. A novel wireless passive multi-parameter 3D integrated capacitive ceramic sensor based on LTCC technology, which can realize the measurement of pressure, temperature and vibration above 600℃ in a single sensor chip simultaneously by passive telemetry, is proposed originally. By solving a series of fundamental technical issues in the process of integrated design and compatible fabrication etc, the capacitive sensing mechanism for multiple parameters based on high-temperature ceramic materials will be explored, and the influence of temperature on the mechanical and electrical properties of LTCC materials will be investigated to provide theoretical foundation for the temperature compensation method of wireless passive ceramic sensor. By in-depth study of electromagnetic coupling relationship between the multiple LC circuits, decoupling algorithm for multi-parameter telemetry signals is constructed to solve the problem of interference among multi-parameter signals. By solving the problems of stress matching and controlling of multilayer ceramic substrate, metal paste and dielectric material in the sintering process, a set of multi-sensing unit integrated manufacturing process methods are established based on LTCC micro-assembly technology. Eventually, a prototype of 3D integrated passive sensor and test system will be developed, which will provide a reference for the development of multi-function passive sensors in harsh environments.

英文关键词： 3D integration;LTCC micro-assembly;Multi-parameter;Passive micro-sensor;Harsh environments