基于SOI高灵敏高过载梁膜结构微压传感器研究

项目名称： 基于SOI高灵敏高过载梁膜结构微压传感器研究

项目编号： No.51305336

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 田边

作者单位： 西安交通大学

项目金额： 24万元

中文摘要： 本项目提出高灵敏、高过载微压传感器梁膜结构及基于绝缘衬底上的硅SOI（Silicon On Insulator）的MEMS制作工艺。以压阻效应及板壳理论为基础提出了"田"字型梁膜结构压力传感器；以耐高温绝缘衬底上的硅材料为基底，研究其MEMS制作工艺。主要研究内容包括压力传感器结构弹性力学分析、分析压阻式压力传感器结构挠度与灵敏度变化过程、将"田"字型梁膜结构与传统压阻式压力传感器结构进行仿真比较、给出"田"字型梁膜结构压力传感器设计的原则、根据建立力学模型推导"田"字型梁膜结构相应的挠度及应力公式、设计压敏电阻、提出相应的制作工艺和测试封装方案。该研究为目前微压传感器制作领域提供了新的设计理念与方案，相应的设计及制作方案，解决压阻式微压传感器的温度稳定性差，灵敏度与线性度矛盾的问题，推动该传感器在微压测量领域的广泛应用。

中文关键词： 梁膜结构；微压；高灵敏；高过载；

英文摘要： This project reports a kind of high sensitivity and overloads micro pressure sensor with beam-membrane structure and relative MEMS fabrication process on the material of SOI（Silicon On Insulator）. The cross beam-membrane structrue is proposed on the basis of the principle of piezoresistive and theory of plate and shell; SOI, a thermostability material, is adopted as the substrate for MEMS fabrication. The main research is focus on the analysis of elastic structure; analysis of the relationship of deflections and sensitivities; comparison of performances between cross beam-membrane and traditional ones through simulation; provide the design principle of cross beam-membrane structure; deduce the mechanics equations of new structure, including deflections and stress on the basis of established model; devise the resistance structures; present the process of fabrication and packaging plan. This study will provide a new idea and plan for resolving the traditional problems of piezoresistive sensor for micro pressure measurement, such as unstable performances at high temperature; contradictory between sensitivity and linearity. This kind of sensor will be widely applied in the field of micro pressure measurement.

英文关键词： beam-membrane；micro pressure；high sensitivity；high overloads；