多晶硅太阳电池表面激光电化学复合阵列织构机理研究

项目名称： 多晶硅太阳电池表面激光电化学复合阵列织构机理研究

项目编号： No.51205212

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 张华

作者单位： 南通大学

项目金额： 25万元

中文摘要： 太阳能的开发和利用已成为新能源研究领域的热点。针对光伏工业中多晶硅太阳电池光电转换效率偏低的问题，研究多晶硅太阳电池表面激光电化学复合阵列织构机理，以探索一种新型复合加工技术，改变传统的无序分布、重复一致性差的多晶硅绒面形貌加工，实现精密可控、有序密布的光陷阱结构加工，有效降低多晶硅太阳电池表面反射率。分别对液相环境下激光作用多晶硅表面微加工的成型规律、多晶硅受激光诱导生成自由载流子对电化学阳极氧化的影响以及激光辐射快速溶解钝化氧化膜对电化学作用的增强效应展开研究，揭示多晶硅表面激光电化学复合作用机理。在此理论研究基础上，以典型多晶硅材料为研究对象，优化工艺参数，协调激光与电化学作用，实现两种加工方法优势互补，完成多晶硅太阳电池表面阵列理想光陷阱结构加工，并通过形貌扫描和光电检测建立多晶硅表面阵列光陷阱几何特征与表面反射率之间的对应关系，为多晶硅太阳电池新型高效绒面技术的研发提供理论指导。

中文关键词： 激光加工；电化学加工；多晶硅；太阳电池；织构

英文摘要： The utilization of solar energy has become a hot-spot of research on new energy. In order to solve the problem of low photoelectric conversion efficiency for multicrystalline silicon solar cells in photovoltaic industry, a new hybrid texturing method combined of laser etching and electrochemical machining has been developed based on the research of the array texturing mechanism. The new process can overcome the defects of traditional method such as disordered distribution and low repeatability. It can effectively reduce the reflectivity of multicrystalline silicon solar cells with high quality texturing of precision controlled and ordered light traps. The mechanism of the hybrid texturing method was revealed by the research on three scientific issues. The issues include the forming law of minimally machining on the surface of multicrystalline silicon with laser machining in liquid environment, the influencing law of the free-carrier generated from the laser-induced multicrystalline silicon on anodic dissolution, and the enhancement effect of ECM actions by the rapid dissolution for passive oxide films with laser irradiation. On the basis of above-mentioned theoretical studies, the advantages of laser etching and ECM were complementary on the object of typical polycrystalline silicon with optimization of process

英文关键词： laser machining；electrochemical machining；multicrystalline silicon；solar cell；texturing