高效能长寿命纯电感耦合射频等离子体电子中和器机理研究

项目名称： 高效能长寿命纯电感耦合射频等离子体电子中和器机理研究

项目编号： No.11475059

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 陈庆川

作者单位： 核工业西南物理研究院

项目金额： 100万元

中文摘要： 在离子源系统及电推进系统中，电子中和器是其中的关键部件。现阶段国内的研究多集中于热电子发射或空心阴极放电方式，存在着一定的缺陷如寿命短、阴极污染和结构复杂等问题。随着离子束技术和电推进技术的发展，迫切需要一种无极、长寿命，能量易控制的电子中和器来满足离子束加工工艺和电推进可靠、长寿命的技术要求。本项目提出一种新型纯感应耦合射频等离子体电子中和器。通过理论、模拟和实验相结合的方法，一方面通过开展射频天线及放电室结构、放电气体成分、气压等因素对射频纯感应等离子体放电特性的影响机理进行研究，获得低能高密度等离子体的产生规律，另一方面通过对放电等离子体电子温度、气压、引出电极结构尺寸、引出电压及引出口附近施加磁场等因素对从放电等离子体中引出低能电子束的影响机理进行研究，掌握高效引出低能电子束的规律及方法。在理论和仿真模拟的基础上，通过实验对电子中和器理论模型和结构等硬件设计进行论证和优化。通过此项研究，为国内新型电子中和器的研制奠定基础。

中文关键词： 射频电感耦合；电子中和器；等离子体放电；高效能

英文摘要： Electron neutralizer is one of the key components in the system of the ion source and the electrical propulsion system. With the development of the ion beam technology and electric propulsion, there is an urgent need for the electron neutralizer with which provided the properties of non-polar, long life, low energy and easy to control. However, many domestic researches were foucsed on hot filament emit and hollow cathode dischrge, which shown some defects. In this projiect, a new type mechanism to produce electron will be brought forward by RF inductive coupled plasma dischare. Using this mechanism, the electron neutralizer will provide the properties such as good stability, long life,low energy, easy controlling, and monochromatic energy.To obtain the aims, It generate the low energy and high density electrons through highly efficient RF pure inductively coupled plasma discharge by reasonable RF antenna and a discharge chamber structure and magnetic field design。Electrons are extracted from the discharge cavity through the suitable extractor structure and size of the holes, the applied suitable magnetic field near the exit of the discharge cavity and the optimization of the electric field.then based on the theory researches, the hardware such as discharge composition, and discharging equipments will be optimized by experiment researches. Through these researches, it will bring about the base for fabricating the new electron neutralizer.

英文关键词： radio frequency inductively coupled;electron neutralizer;plasma discharge;high efficiency