基于硅工艺的太赫兹芯片级倍频链技术研究

项目名称： 基于硅工艺的太赫兹芯片级倍频链技术研究

项目编号： No.61471093

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 杨自强

作者单位： 电子科技大学

项目金额： 83万元

中文摘要： 传统固态太赫兹倍频链电路采用混合集成电路方式实现，从微波频段倍频至太赫兹频段，需要多级倍频，电路结构复杂、体积大、加工精度差、调试工作量大。为解决以上问题，本项目将着手把硅技术引入太赫兹倍频链电路设计中，硅技术不仅具有集成度高、功耗小等优点，并且还有与后端基带数字信号处理器集成到一块芯片成为SOC的巨大潜力。在同种硅工艺条件下，肖特基势垒二极管（SBD）器件的截止频率远高于MOS器件，以0.13μm 硅CMOS工艺为例，其MOS器件截止频率约为100GHz，而SBD器件截止频率则高达2THz，SBD器件的运用必将大大提升硅基单片集成电路的工作频率。本项目将研究硅基SBD器件优化和高效建模方法，以及倍频链芯片中的关键电路在太赫兹频段的特性，探索适合倍频链芯片的设计方法。本项目的顺利实施将为太赫兹倍频链芯片设计提供有效的理论支撑。

中文关键词： 太赫兹；倍频链；硅；单片集成电路

英文摘要： Traditional terahertz multiplier chain solid-state circuits are realized by hybrid integrated method. More than one multipliers are needed from microwave band to THz band. So the hybrid integraed multiplier chain circuits have disadvantages of complex structure, large size, poor machining accuracy, and debugging difficuilt. To solve the above problems, the silicon technology will be introduced into the terahertz frequency multiplier chain circuit design in this project. The silicon technology is not only high integration and low power consumption, but has the potential to be integrated into a single chip, which is called SOC, with base band digital signal processor circuits. The cutoff frequency of schottky barrier diode (SBD) devices are much higher than that of MOS devices in the same silicon process conditions. The cutoff frequency of MOS devices are about 100GHz, while the cutoff frequency of SBD devices are as high as 2THz in the 0.13μm Si CMOS process. The use of SBD devices will greatly enhance the operating frequency of the silicon monolithic integrated circuit. This project will research the silicon-based SBD devices optimized and efficient modeling methods, as well as the key circuits of the terahertz multiplier chain chip, and explore the design method for single-chip terahertz frequency multiplier chain. The results of this project can provide theoretical support for the single-chip terahertz frequency multiplier chain design.

英文关键词： THz;multiplier chain;si;monolithic integrated circuits