高温声表面波传感器的非线性和多层膜理论研究

项目名称： 高温声表面波传感器的非线性和多层膜理论研究

项目编号： No.11304346

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 柯亚兵

作者单位： 中国科学院声学研究所

项目金额： 25万元

中文摘要： 声表面波( SAW) 传感器能工作于高温、强电磁辐射、高速运动等恶劣环境，且具有无线无源优点，因此SAW传感器在石油、化工、冶金、汽车、航空航天以及国防等高温传感领域（600℃以上）具有重大的应用潜力。多层膜结构和超高温无机非金属压电材料使得SAW传感器能承受超高温度,已有研究方法存在的问题包括：非线性基片材料参数在高温下不精确和未考虑有限长多层膜结构，这些问题急待新的理论研究。本项目拟在有限长单层膜有限元-边界元（FEM-BEM）和周期多层膜FEM-BEM的基础上，构建多层膜结构的有限长多层膜FEM-BEM理论；将常温SAW测量方法推广到高温环境，探索非线性基片材料参数的测量方法；两者结合完成多层膜结构的非线性分析理论。本研究在多层膜SAW器件的研究方面具有重要意义，同时在高温SAW传感器研制方面具有重要实用价值。

中文关键词： 声表面波；高温传感器；多层膜；有限元-边界元；非线性

英文摘要： Surface acoustic wave ( SAW ) sensors have the advantages of wireless and passive sensing and working in harsh environment such as high temperature, strong electromagnetic radiation, high speed media. So SAW sensors have significant potential value for applications in petroleum, chemical, metallurgy, automobile, aerospace and national defense and other applications working in high temperature environment (above 600 ℃). In order to withstand the high temperature, SAW sensors use multilayer structures and high temperature inorganic piezoelectric substrate. There are some problems that are the inaccurate nonlinear substrate material coefficients in high imprecision and the multilayer theory not suited for finite-length structures, so the new theories to solve these problems are desired. This research proposes a finite element and boundary element ( FEM-BEM ) theory for finite multilayer structures, based on the original FEM-BEM thoeries. Extending the SAW measurement to the high temperature environment, a new method to measure the nonlinear substrate material coefficients is derived. Combined with the above two thoeries, the nonlinear theory for multilayer structures is produced. This research is important for the theory of SAW devices with multilayer structures, and has practical value for high temperature SAW se

英文关键词： Surface acoustic wave；high temperature sensor；multi-layer；FEM-BEM；nonlinear