陶瓷微热板气体传感器阵列快速响应机制及微观失稳特性研究

项目名称： 陶瓷微热板气体传感器阵列快速响应机制及微观失稳特性研究

项目编号： No.61501149

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 赵文杰

作者单位： 哈尔滨理工大学

项目金额： 22万元

中文摘要： 本项目是以大气污染下典型有毒有害气体CO、SO2、NOx、O3等快速检测技术中传感器的失稳特性为研究目标，针对目前半导体气体传感器及阵列检测技术存在响应慢、稳定性差、易受环境干扰等共性缺点，提出采用具有良好机械性能和热性能的AlN/Al2O3作介质膜和衬底，设计并制备陶瓷微热板传感器阵列为研究平台。研究微热板传感器阵列微观尺度效应、微传热机制及阵列单元之间的热干扰特性。研究微观尺度下多层异质膜电/热/力多场耦合失稳特性，建立热瞬态响应时间尺度依赖关系模型，揭示电子、声子的电热耦合效率、输运及散射机制对响应速率及失稳特性的影响机理。在检测上研究温度调制效应，确立脉冲温度调制频率与幅值对最佳工作温度及响应速率影响特性。从而实现传感器阵列结构尺度设计、工艺制备及检测方法优化与改进，有效解决气体传感器阵列的快速响应机制和失稳问题，提高复杂大气环境下传感器阵列气体检测速率及抗环境干扰能力。

中文关键词： 传感器阵列；传感系统；传感器微型化；多功能综合传感器

英文摘要： This project will aim at the instability characteristics of gas sensor array under the rapid detection technology of the poisonous and noxious gases like CO、SO2、NOx、O3 exsiting in the current atmospheric haze. Since the semiconductor gas sensor array has the disadvantages of slow response, poor stability and sensitive to environmental interference, the ceramic microhotplate gas sensor array with good thermal stability and self-thermal isolation, is designed and developed, exploring the AlN/Al2O3 materials as a substrate which have excellent mechanical and thermal properties. The microscopic scale effect and heat-transfer mechanism of microhotplate sensor array are studied, and the thermal interference characteristics among sensor array units are analyzed. In addition, the coupling instability characteristics of electric, thermal and force fields for multilayer dielectric films are investigated in micro-scale, and then the thermal transient response model with time scale is built. The effects of the electrothermal coupling efficiency, transport and scattering mechanism of electron and phonon on the response rate and instability characteristics are revealed. The temperaute modulation effect is studied in order to establish the optimum operating temperature and response rate for the pulse temperature modulation frequency and sampling frequency. Thus, the optimization and improvement of sensor array can be realized from the structure size design, preparation process and detection method, which will effectively solve the existing problems in the rapid response mechanism and instability for gas sensor array, and hence the detection rate and the capability of anti-environmental disturbance of gas sensor array can be enhanced greatly in atmospheric environment.

英文关键词： sensor array;sensor system;miniaturization of sensors;multifunction sensor