硅基纳米光波导陀螺敏感机制及导波结构表面光滑化关键技术研究

项目名称： 硅基纳米光波导陀螺敏感机制及导波结构表面光滑化关键技术研究

项目编号： No.61275166

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 闫树斌

作者单位： 中北大学

项目金额： 93万元

中文摘要： 针对当前光纤陀螺体积大、成本高和MEMS陀螺灵敏度低、可靠性差的技术瓶颈问题，开展基于纳米光波导的谐振式陀螺基础研究，拟在单一芯片上实现基于光学原理的角速度测试，为实现微小型化、全固态、高可靠性、可批量制造的高精度导航级陀螺奠定理论基础并提供关键技术。项目围绕硅基纳米光波导陀螺，重点突破硅基纳米光波导微腔物理、纳米受限空间光传输机理、微纳跨尺度制造方法、功能波导结构单元间互连技术以及微腔惯性参量测量理论等基础科学问题和共性关键技术，研制出硅基纳米光栅垂直互连结构、纳米光波导高效耦合单元、纳米光滑度光波导谐振微腔等纳米光波导陀螺关键部件，进而实现纳米光波导陀螺角速率高灵敏检测效应。

中文关键词： MEMS；光波导；微腔；表面光滑化处理；光纤陀螺

英文摘要： Given that the fiber optic gyroscope has large volume and high cost, the MEMS gyroscope has the problems of low sensitivity and poor reliability. We proposed the MOEMS gyroscope inertial devices based on the silicon nano-waveguide. It has many excellent characters such as miniaturization, all-solidness, robustness, and mass-produced. This novel MOEMS gyroscope device can realize the measurement of angular velocity on a single chip. To achieve better performance, some basic scientific issues and common technologies should be studied deeply, including micro-cavity physics of silicon nano-waveguide, optical transmission mechanism in the nanometer limited-space, micro-nano cross-scale manufacturing methods, interconnection technology of the waveguide functional units and the theory of inertial parameters measurement based on micro-cavity. Based on the study above, we can develop a serial of key components for the nano-waveguide gyroscope. Applying these functional units, vertical diffraction grating, efficient coupled nano-waveguide units, waveguide resonator with nano-level smoothness, we can fabricate the nano-waveguide inertial device and verify the function of rotation sensing.

英文关键词： MEMS；optical waveguide；microcavity；Surface smooth；optical fibre gyro