中红外量子级联激光器腔面温度分布和失效机理研究

项目名称： 中红外量子级联激光器腔面温度分布和失效机理研究

项目编号： No.61274094

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 王利军

作者单位： 中国科学院半导体研究所

项目金额： 85万元

中文摘要： 本项目将对InP基InGaAs/InAlAs中红外量子级联激光器（QCL）的腔面温度分布和失效机理进行研究，主要内容包括：用微区拉曼方法测量处于工作状态的QCL腔面温度分布；在模拟中，考虑边界散射和注入电流分布等因素的影响，对实验结果进行合理解释；分析大电流注入后形成的缺陷结构及其演化规律，研究器件失效机理；改进器件结构和热管理技术，提高器件性能。本项目的创新性在于：（1）首次采用微区拉曼方法利用斯托克斯线与反斯托克斯线的强度比得到室温连续工作QCL的腔面温度，这比利用微区光致发光（PL）峰位移动得到的温度更准确；（2）通过对拉曼频移量和PL峰位移动进行分析，可得到热失配引起的应力分布；（3）将边界散射和注入电流分布对温度分布的影响考虑到模拟过程中，模拟结果更完善。通过本项目研究，可以更准确的掌握室温连续工作时QCL有源区的热积累程度，深入理解器件的失效机理，进一步提高器件性能。

中文关键词： 量子级联激光器；腔面温度分布；失效分析；微区拉曼光谱；高性能

英文摘要： This project will focus on the facet temperature distribution and failure mechanism of InP based InGaAs/InAlAs mid-infrared quantum cascade lasers (QCLs). The main contents are: (1)Using micro-Raman method to measure the facet temperature distribution of operating QCLs;(2)Simulating the temperature distribution profile by taking into account the boundary scattering and injection current distribution; (3)Analyzing the defects developed after high injection currents, including the defects structure and their evolution, understanding the QCL failure mechanism; (4)Improving the device structure and thermal management, to further enhance the device performance. The innovation in this project includes: (1)It is the first measurement of the facet temperature distribution of operating QCLs by using the intensity ratio of the Stokes and anti-Stokes Raman line intensity,which is more accurate than using the micro-photoluminescence (PL) peak shift analysis.(2) By analyzing the Raman peak shift and PL peak shift, the strain induced from the heat accumulation can also be obtained; (3)In the temperature profile simulation, the boundary scattering and injection current distribution are also considered, so that the result will be more reliable. By accomplishing this work, we can get a more accurate temperature distribution and

英文关键词： Quantum cascade laser；facet temperature distribution；failure analysis；micro-Raman spectroscopy；high performance