同步辐射红外谱学和显微成像研究场效应下半导体－绝缘介质界面电荷动力学

项目名称： 同步辐射红外谱学和显微成像研究场效应下半导体－绝缘介质界面电荷动力学

项目编号： No.11275203

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 数理科学和化学

项目作者： 戚泽明

作者单位： 中国科学技术大学

项目金额： 87万元

中文摘要： 各种新材料在场效应晶体管中的应用是当前新型器件的研究热点，也面临着许多复杂的新问题，其中半导体和栅绝缘介质的界面电荷动力学，以及材料在电场作用下的行为是人们关心的核心问题。电荷调制的红外谱学为研究半导体和栅绝缘介质的界面间的电子激发和输运、以及电场对介电系数的影响等关键问题提供了独特的、重要的谱学探针。但纳米尺度的半导体和栅绝缘介质的界面电荷积累层，以及位于远红外波段的低频红外声子模式给常规红外谱学测量带来困难。同步辐射红外辐射的高亮度以及远红外区强度优势，为开展此项研究提供了强有力的支持。我们通过发展同步辐射红外谱学和显微成像技术，建立复杂材料电场原位的谱学研究测试方法，研究场效应下半导体和栅绝缘介质界面的电子激发、载流子分布和输运，以及场效应对介电系数的影响，为深入理解输运机制、探寻新材料及其在器件中的应用提供物理依据，也为研究电场效应调控材料性质提供了极有效的方法。

中文关键词： 同步辐射；电荷传递；红外谱学；半导体；绝缘体

英文摘要： The application of new novel materials to field effect transistor is the current research focus of new type electronic component. However, it is still facing many complex new problems. The charge dynamics of the interface between semiconductor and gate dielectric, as well as the behvior of matrials under electric field are the key points. Charge modulation infrared spectroscopy provides a unique and important spectroscopic probe for the studying these key problems such as the excitation and transport in the interface between the semiconductor and gate dielectric, the modification of electric field on the dielectric constant and so on. But it is difficult for the infrared spectroscopy measurement using conventional thermal source because the charge accumulation layer at the interface is in nanoscale, and the low frequency infrared phonon modes which have important influence on the dielectric constant are located at far infrared region. The high brightness and more flux in far infrared region of Synchrotron infrared soruce provides a powerful support for the study. In this application, we will develop synchrotorn infrared spectroscopy and imaging technique and estabish a spectrospic probe platform for the studing of the effect of electric field on complex materials. Based on the platform, we will study the electro

英文关键词： Synchrotron radiation；charge transfer；infrared spectroscopy；semiconductor；insulator