微陀螺片上后台自校准与自补偿关键技术研究

项目名称： 微陀螺片上后台自校准与自补偿关键技术研究

项目编号： No.61474120

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 尹韬

作者单位： 中国科学院电子学研究所

项目金额： 70万元

中文摘要： 微陀螺是最重要的微传感器之一。航空航天、武器装备等导航级应用需求驱动微陀螺向着高稳定性方向发展。微传感器件参数与工艺、材料、封装等密切相关，性能受环境、老化、机械疲劳等影响显著，仅从微传感器件角度难以满足导航级应用的长期稳定性需求，片上校准和补偿方法是研发导航级微陀螺的一种必要方法。本项目针对传统微陀螺出厂校准方法需要使用专用仪器，无法在应用现场使用，且效果仅对校准时刻有效的问题，以及现有微陀螺片上校准方法为前台工作方式，无法在微陀螺正常工作时进行，校准补偿效果受限的问题，力图从接口电路设计角度进行探索，提高微陀螺系统的长期稳定性，以满足导航级应用需求。核心思想是：借鉴模数转换器的后台校准思想，在微陀螺接口芯片上内置后台校准电路，在不借助片外仪器的情况下，以后台工作方式，实时准确检测系统的标度因子、零偏参数，并实时进行校准与补偿，提高微陀螺在各种应用条件下性能的长期稳定性。

中文关键词： 微陀螺；接口芯片；自校准；数字后台校正；导航

英文摘要： MEMS (Microelectromechanical Systems) gyroscope is one of the most important silicon sensor. The navigation applications demands of aerospace and weapons drive the development of the MEMS gyroscope with excellent long-term stability. The performance of MEMS gyroscope device is closely related with material, process, parasitic effect and device structure. When there is dramatic change in the environment, or in the case of aging and mechanical fatigue, the parameters of micro-gyroscope will experience a significant change which leads to poor long-term stability and cannot meet the navigation-grade applications. It is difficult to solve the long-term stability problem only from the perspective of MEMS device research. It is necessary to research on-chip calibration and compensation method for the navigation-grade MEMS gyroscope development. The current interface circuit mainly adopts the method of factory calibration to improve the performance and reliability. The interface circuits, whose parameters are solidified after the test and configuration with special instruments, can not automatically correct itself to adapt to the changes in device parameters. The project tries to alleviate the stability requirements to the MEMS devices from the perspective of interface circuits and improve the long-term stability of micro-gyroscope system by adopting the method of on-chip background parameters self-test and self-calibration.

英文关键词： MEMS gyroscope;interface circuit;self-calibration;background calibration;navigation