深冷处理对提高炭基薄膜膜基结合强度的作用及机理研究

项目名称： 深冷处理对提高炭基薄膜膜基结合强度的作用及机理研究

项目编号： No.51271153

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 一般工业技术

项目作者： 聂朝胤

作者单位： 西南大学

项目金额： 80万元

中文摘要： 深冷处理是改善金属结构材料力学性能的有效途径，但应用于功能薄膜的例子极为鲜见，特别是深冷处理对薄膜与基体的膜基结合强度的作用与影响尚无人研究。我们在前期研究中偶然发现，对TiN、DLC等薄膜及其膜基体系进行深冷处理后，可显著提高体系的膜基结合强度等力学特性。但其机理并不明确，我们推测：膜基结合强度的提高与深冷处理条件下界面结构致密化、元素析出及析出相在界面及薄膜中的扩散、膜基体系残余应力的驰豫有关。本课题将以TiN和DLC薄膜为基础，研究深冷处理对硬质薄膜及其膜基体系组织、结构和力学性能影响的共性，着重探讨深冷处理过程中薄膜及基体内部的相变过程、晶体结构缺陷的演变规律及与体系应力驰豫的关系，探讨深冷处理对薄膜织构及膜基界面结构的影响，建立深冷处理条件下膜基体系的热-相变-力学耦合问题分析的有限元模型，模拟计算深冷处理过程中膜基体系残余应力的大小和分布。为提高硬质薄膜膜基结合强度提供新思路。

中文关键词： 深冷处理；碳基薄膜；膜基结合强度；残余应力；气相沉积

英文摘要： Cryogenically treatment is a effective method to improve the mechanic properties of Structural metal materials,but it is rarely used in films,especially there are not people have done any study about how to improve the interface adhesion of film/matrix system by cryogenically treatment. Through our previous studies show that the mechanic properties such as interface adhesions of TiN/matrix and DLC/matrix were remarkably improved after cryogenically treatments for the first time, But the mechanisms are not still understanded.We think it is related closely to the interface densification , the diffusion of precipitated phase in interface and film, the residual stress relax in film/matrix systems.The aim of this project is to reveal this mechanisms. In our study TiN and DLC are selected as the basic study films, the main study items are as follows: 1) the evolution of phase transition and crystal defects during cryogenically treatment, as well as it's relationship with the stress relaxation of film/matrix system; 2)the effect of cryogenically treatment on film texture and interface structure of film/matrix; 3) modeling and simulation of theomo-phase transition-dynamics behaviour under cryogenically treatment process, as well as simulation of the magnitude and distribution of the residual stress in film/matrix system

英文关键词： cryogenically treatment；carbon film；interface adhesion；residual stress；vapor deposition