复合型飞秒激光加工多尺度三维光流体集成器件及应用研究

项目名称： 复合型飞秒激光加工多尺度三维光流体集成器件及应用研究

项目编号： No.61475149

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 吴东

作者单位： 中国科学技术大学

项目金额： 78万元

中文摘要： 光流体(Optofluidics)是一种集成光学器件和微流体技术的新型可调谐光学器件，通过控制流体的光学性质来实现特定功能。由于对液体的控制比固体简单，光流体器件具有更好的光学可调谐性。目前基于平面微加工技术的二维光流体器件难以满足高性能光学应用，如真三维环境仿生研究。本项目将发展一种复合型的飞秒激光三维多尺度加工技术，首先利用飞秒激光在玻璃内部刻蚀三维的微流体通道（～cm），再灌入聚合物，并利用双光子聚合技术集成三维的高精度微光学器件（～um/nm），从而构成多尺度真三维光流体器件。本项目主要研究内容有：（1）搭建兼有大范围和高精度加工能力的复合型激光微纳加工系统（2）飞秒激光刻蚀高平滑度三维玻璃微通道的超快吸收机制及关键工艺（3）双光子聚合在三维玻璃微通道内的微光学器件制备的工艺及对精度分析（4）针对在光学调谐、流体物理和生物探测等特定应用的新型真三维光流体器件的设计和制备

中文关键词： 微纳加工；飞秒激光；微流控芯片；微光学；光流体

英文摘要： Optofluidics is the integration of microoptics and microfluidics technologies for developing new tunable optical devices, which can achieve special functionality by controlling the fluid. Since the liquid control is simpler than the solid control, optofluidic device exhibits better optical tunability. However, current flat micromachining technology is suitable for two-dimensional optofluidic devices, which is difficult to satisfy high-performance optical applications and true three-dimensional environment biomimetic research. This project will develop a hybrid three-dimensional (3D), multiscale femtosecond laser fabrication technology which combined fs laser assisted etching of glass and two-photon polymerization of polymer. The fabricated 3D microfluidic channels (~ cm) and integrated 3D high-precision microoptics (~ um/nm) constitutes a true 3D optofluidic device. The main contents are: ( 1 ) to build femtosecond laser microfabrication system with both large area and high precision processing ability ( 2 ) The ultrafast absorption mechanism and key process of femtosecond laser etched glass microfluidic channels with high smoothness ( 3 ) the crucial process and precision analysis of two photon polymerization integration of high precision 3D microoptical devices in 3D glass microchannel ( 4 ) Design and preparation of true 3D optofluidic devices for high-performance applications in optical tuning, fluid physics and biological detection and so on.

英文关键词： Microfabrication;Femtosecond laser;Microchip;Microoptics;Optofluidic