面向红外探测应用的飞秒激光微结构化黑硅的掺杂改性研究

项目名称： 面向红外探测应用的飞秒激光微结构化黑硅的掺杂改性研究

项目编号： No.61307119

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 赵纪红

作者单位： 吉林大学

项目金额： 26万元

中文摘要： 红外探测技术在军事和民用中均具有重要意义。目前飞秒激光制备的硫族元素掺杂黑硅可以将其吸收范围延伸至2.5微米的近红外波段，因而该材料在红外硅基集成光电子芯片的应用具有广阔前景。然而，这种新颖黑硅材料仍面临着红外吸收机理不明朗、吸收热退火失效以及光电转换机理不清等问题，这显著制约了其在红外探测中的应用。本项目在申请者前期良好工作基础上，拟通过非平衡掺杂黑硅的飞秒激光制备结合第一性原理研究方法，探索掺杂改性黑硅材料的红外吸收物理根源及杂质退火演化规律，具体研究内容包括黑硅材料的红外吸收机制及红外光子俘获分离第一性原理研究；红外吸收退火稳定的黑硅材料制备；黑硅器件的红外光电转换效率研究。通过以上研究工作澄清黑硅材料红外吸收及光电转换的物理本质，为我国在高性能黑硅红外材料的自主创新设计及应用提供重要建议。

中文关键词： 红外探测；黑硅；非平衡掺杂；飞秒激光；第一性原理

英文摘要： Infrared (IR) detection technique holds the significance on many fileds both for military and civil. Now a kind of noval IR material called black silion, which is made by femtosecond laser doping with chalcogen impurity, can extend the absorption to the wavelength of 2.5 μm. Therefore, such material can be especially suitable for the IR silicon-based integrated optoelectronics. However, the black silicon still have several difficulties to hinder its application on IR detection: the mechanism of IR absorption is still under debate; the loss for IR absorption after heat annealing and the efficiency of photoelectric converstion is still not clear. In this proposal, based on our former investigation, we will employ the femtosecond-laser doping technique combined with the first-principles calculations to study the origin of IR absorption for black silicon and the evolution behvior for the external impurity under annealing. The research contents include: the first-principles study on the reason for IR absorption and the ability for the electron-hole seperation; the black silicon fabrication with stable IR absorption; study on the photoelectric converstion by black silicon IR detector. It is expected that, by the works above, important suggestions to realize the high-performance IR black silicon can be obtained for the

英文关键词： infrared detection；black silicon；non-equilibrium doping；femtosecond laser；first-principles