三维复杂形状衬底上液相电沉积纳米类金刚石薄膜研究

项目名称： 三维复杂形状衬底上液相电沉积纳米类金刚石薄膜研究

项目编号： No.11204024

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 物理学I

项目作者： 何洋洋

作者单位： 大连民族学院

项目金额： 25万元

中文摘要： 采用液相电化学方法在三维形状复杂金属衬底上沉积纳米类金刚石(DLC)薄膜。研究沉积过程中碳源、添加剂、电压、两极间距和温度等工艺参数对薄膜的生长速度、表面形貌和结构成分的影响。通过优化工艺参数、改进实验装置等途径，在衬底上获得形貌和结构各处均匀的纳米类金刚石薄膜。在沉积体系中加入N、Si、Ca等掺杂元素，研究掺杂元素在薄膜中的存在形式以及掺杂元素的种类和浓度对类金刚石薄膜形貌结构的影响。选择适当的掺杂元素和浓度，通过掺杂改善类金刚石薄膜的强度和耐磨性，延长其作为保护涂层的使用寿命。研究液相沉积类金刚石薄膜生长机理，建立形状复杂的三维衬底上液相电沉积类金刚石薄膜的理论模型，为满足生物医学材料表面保护涂层要求的类金刚石薄膜的液相制备做基础研究。

中文关键词： 类金刚石薄膜；三维形状衬底；液相电化学沉积；拉曼光谱；掺杂

英文摘要： Deposition of nano Diamond-like Carbon (DLC) films on three-dimensional (3D) substrates made of metal using liquid electrochemical technique is carried out. The effects of carbon source, additive, applied potential, anode-substrate distance and temperature on the growth rate, morphology and microstructure of DLC films are investigated, respectively. Nano DLC films of uniform morphology and microstructure are deposited on 3D substrate by the selection of appropriate deposition parameters and modification of experimental setup. The presence of doping element in the films, such as N, Si and Ca,respectively, is investigated, as well as the effects of doping element and concentration on the morphology and microstructure of DLC films. The hardness and tribological properties of the DLC films are improved by selection of appropriate doping element and concentration, the working time of the DLC films used as protect coatings is therefore prolonged. The mechanism of liquid electrochemical technique is discussed, in order to establish the system info of DLC films deposition on 3D substrates by liquid electrochemical technique. This is part of the basic research work of deposition of nano DLC films using for biomedical coatings by liquid electrochemical technique.

英文关键词： Diamond-like carbon films；Threedimensional shape substrates；Liquid electrochemical deposition；Raman spectroscopy；Doping