声表面波高温压力温度组合敏感理论与优化结构研究

项目名称： 声表面波高温压力温度组合敏感理论与优化结构研究

项目编号： No.50875167

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 武器工业

项目作者： 吉小军

作者单位： 上海交通大学

项目金额： 30万元

中文摘要： 针对声表面波（SAW）高温压力传感器研究中发现的温度交叉敏感严重、传统补偿方法效果不理想、输出信号稳定性差、缺乏有效分析和设计理论等问题，本项目以弹性力学的有限变形理论、偏载扰动理论和有限元分析方法为基础，研究了声表面波压力、温度交叉敏感的非线性耦合模型，提出了SAW压力传感器敏感基片优化选择的基本准则。设计了悬臂梁式和纵横应力比可调膜片式两种受力结构，实现了在200℃#21644;500℃#26465;件下的温度漂移补偿和温度、压力组合测量，研究开发了信号检测电路和处理算法。所设计传感器的灵敏度达到40KHz/bar,达到国外文献报道的最高水平。

中文关键词： 声表面波；高温；压力传感器；温度补偿

英文摘要： In order to solve the problems of SAW high temperature pressure sensor such as serious temperature cross sensitivity, unsatisfied compensation method of traditional, poor stability of output signal, lack of effective analysis and design theory, and so on, this project proposed the basic principle of optimal selection the sensitive substrate of SAW pressure sensor, after studying the nonlinear coupling model of SAW pressure and temperature cross sensitivity based on the finite deformation theory of elastic mechanics, partial load perturbation theory and the finite element analysis method. The cantilever beam force structure and the adjustable vertical and horizontal stress ratio diaphragm force structure were designed, the temperature drift compensation and the combined measurement of temperature and pressure were realized under the condition of 200℃and 500℃respectively, the signal detection circuit and signal processing algorithm were developed. The sensitivity of designed sensor was about 40KHz/bar which reached the highest level of foreign literatures reported.

英文关键词： SAW；High Temperature;Pressure Sensor; Temperature compensation