双通道时空混合相移干涉系统及相关问题研究

项目名称： 双通道时空混合相移干涉系统及相关问题研究

项目编号： No.61475048

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 吕晓旭

作者单位： 华南师范大学

项目金额： 88万元

中文摘要： 针对传统相移光学相位干涉测量中精度易受环境干扰、难以实现动态相位测量的问题，提出一种同时具有同时空域相移和时域相移功能的双干涉通道相移相位测量方法和系统。利用双干涉通道的同时空域相移功能与两步相移算法结合，实现动态相位测量；利用双干涉通道的同时空域相移功能与时域相移功能结合，实现在实际相位测量过程中时域相移量的在线实时高精度标定，从而监测和抑制环境干扰的影响。利用干涉、衍射原理和显微测量方法，使两个图像传感器阵列面之间的空间匹配精度达到亚微米。在干涉图中条纹任意分布和不限定数量的情况下，通过两步相移算法的改进，实现相位的动态高精度测量，通过1-范数相移量标定方法的改进，实现时域相移量的在线实时高精度标定。利用系统的综合功能，为研究相移相位测量中存在的其他问题提供平台，拓展其应用领域，为系统的进一步改进积累经验。

中文关键词： 光信息处理；光学相位测量；相移；动态干涉测量；数字全息

英文摘要： A two-channel spatiotemporal hybrid phase-shifting interferometry system with the simultaneous spatial phase-shifting and temporal phase-shifting function, which can eliminate the phase shifts error induced by the environmental disturbance and perform the dynamic phase measurement, is proposed in this project. Combining the two-channel interferometry system with the simultaneous spatial phase-shifting function and two-step phase-shifting algorithm, the dynamic phase measurement can be performed. Combining the two-channel interferometry system with the simultaneous temporal phase-shifting and spatial phase-shifting function, the temporal phase shifts can be calibrated in real time during the phase measurement. Utilizing the principal of interference and diffraction, as well as the microscopy, the spatial alignment accuracy of two image sensors can reach sub-micron level. For an arbitrary interferogram with random fringe distribution and arbitrary fringe number, the dynamic phase measurement with high-precision can be implemented by improving two-step phase-shifting algorithm. Moreover, the temporal phase shifts also can be calibrated in real time by improving the 1-norm algorithm. Based on the comprehensive function of two-channel spatiotemporal hybrid phase-shifting interferometry system, it will supply a new platform for the other phase-shifting phase measurement research.

英文关键词： Optical Information Processing;Optical Phase Measurement;Phase Shifting;Dynamic Interferometry;Digital Holography