氩等离子体弧处理金刚石自支撑膜强度提高的机制

项目名称： 氩等离子体弧处理金刚石自支撑膜强度提高的机制

项目编号： No.51272024

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 一般工业技术

项目作者： 李成明

作者单位： 北京科技大学

项目金额： 80万元

中文摘要： 超高音速飞行器红外光学窗口承受强烈的气动冲击和热震，光学级金刚石自支撑膜窗口的强度是极为重要的关键技术指标。本课题以真空氩等离子体弧高温处理可大幅度提高金刚石自支撑膜断裂强度的实验现象为基础，主要研究内容包括：分析金刚石自支撑膜在氩等离子体弧高温处理过程中，膜中氮氢杂质原子键合特点及扩散规律；建立金刚石相在等离子弧高温下的石墨化动力学模型；阐述晶界处非金刚石相在氩等离子体弧处理过程中的演变规律及其与空位或杂质的相互作用关系；揭示氩等离子体弧处理对金刚石自支撑膜强度的影响规律及作用机制。为最终通过氩等离子体弧处理工艺的精确控制，实现金刚石自支撑膜断裂强度的提高提供理论依据。本研究对于高性能大尺寸金刚石自支撑膜红外窗口材料的制备及应用具有重要的理论与工程意义。

中文关键词： 自支撑金刚石膜；断裂强度；氩等离子体弧；快速热处理；石墨化

英文摘要： Since the IR windows of hypersonic flight vehicles work under strong pneumatic and thermal shock, Fracture strength has become a crucial factor to decide the application of self-standing diamond films in this realm. This project is based on the fact that vacuum argon plasma arc high temperature treatment can greatly improve the fracture strength of self-standing diamond films. The researches are given below. During the high temperature treatment, bonding properties and diffusion rules of impurity atoms such as nitrogen and hydrogen in the films were analyzed; the dynamic model of graphitizing for the diamond phase was built; evolution of non-diamond phase on the interface and its interaction with vacancies or impurity atoms were explained; the mechanism of the enhancement were revealed. These results will provide Theoretical basis for final using of certain vacuum argon plasma arc high temperature treatment to improve the fracture strength of self-standing diamond films. This project has great theoretic and technological meaning to the fabrication and application of high-performance self-standing diamond film IR window with large size.

英文关键词： free-standing diamond film；fracture strength；Ar plasma arc；rapid heating treatment；graphitization