超重力场诱导调控硅纳米线阵列制备及其高性能气敏器件的界面化学研究

项目名称： 超重力场诱导调控硅纳米线阵列制备及其高性能气敏器件的界面化学研究

项目编号： No.51503210

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 一般工业技术

项目作者： 段春阳

作者单位： 中国科学院过程工程研究所

项目金额： 20万元

中文摘要： 硅纳米线阵列“自上而下”的可控制备及界面化学调制是实现其在能源、环境、检测等很多领域应用的关键科学问题。针对现有金属辅助刻蚀法制备硅纳米线阵列过程中金属纳米颗粒运动混乱、气泡逸出困难、液相传质受阻，以及硅纳米线表面态复杂、在空气中不稳定的瓶颈问题。本申请拟通过在刻蚀过程中引入超重力场，以“大化工”技术促进“小纳米”结构的可控，研究超重力场对颗粒运动、气泡成核及逸出、传质增强的作用机理，探寻超重力场诱导硅纳米线阵列可控制备的动力学因素；在此基础上，通过功能导向界面的主动设计，用结构多样、易于接枝的硅烷对硅纳米线进行界面调制，研究表面掺杂影响硅纳米线表面电子态、亲疏水性能的能量机制及规律，从分子尺度识别表面化学对硅纳米线气敏特性的影响机制。此方面的研究突破将为硅纳米线阵列基气敏器件的高效、特异性检测提供新的理论及实验基础。

中文关键词： 超重力场；硅纳米线阵列；界面调制；气相传感；石墨烯

英文摘要： Controllable fabrication of silicon nanowires array with top-down method and developing effective surface modification strategy are the key issues for their promising applications in the fields of energy harvesting, environmental protection, and molecule sensing. However, it is challenged by the obstacles of widely-used metal-assistant catalytic etching (MACE) process, such as: disordered motion of metal nanoparticles in etchant, hindered bubbles escaping, reluctant liquid mass transfer, as well as the complex surface sites and instability of silicon nanowires surfaces. This proposal suggests introducing high-gravity field in the conventional MACE method and developing surface modulation strategy with silanes to solve thses issues. In this project, we will 1) graft the large-scale chemical manufacturing technology into nanomaterials controllable synthesis process innovatively, study the influence of high-gravity field on metal nanoparticles movement, bubbles escaping and liquid mass transfer; 2) explore the dynamic of high-gravity field induced controllable fabrication of silicon nanowires array; 3) reveal the energetic dynamics of silicon nanowires surface modification induced surface transfer doping, based on functionally guided active design; 4) illuminate the response mechanism of silicon nanowires interfacial chemistry to their gas-phase sensing characteristics. The breakthroughs in this area will provide new theoretical and experimental basis for high-performance silicon nanowires array based gas-phase sensing devices.

英文关键词： High-gravity field;Silicon nanowires array;Surface modification;Gas-phase sensing;Graphene