高性能复眼透镜宏微纳跨尺度多级结构可控制造技术研究

项目名称： 高性能复眼透镜宏微纳跨尺度多级结构可控制造技术研究

项目编号： No.51475361

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 王文君

作者单位： 西安交通大学

项目金额： 85万元

中文摘要： 为获得同时具备大视角和弱光探测能力的理想复眼透镜系统，解决高性能复眼透镜三维结构制造的难题，本项目提出采用先制造次级结构、再形成初级结构的创新思路，利用纳米压印、激光光致膨胀和气压辅助成形等工艺手段，实现理想复眼纳米+微米+毫米三维多级跨尺度结构的高效制造。由于该技术采用平面工艺制造难加工且数目众多的次级结构，再通过结构基体的整体变形实现次级结构的三维曲面化，因此，回避了传统多级结构曲面加工技术存在的效率和结构特征完整性等问题，能够实现复眼透镜各级结构的精确调控，为高性能复眼透镜器件优化提供了制造技术保障。本项目将在柔性约束层作用下激光光致膨胀机理、基材大曲面变形对表面微纳结构形貌的影响规律、复眼透镜多级结构的尺度、形状及分布状态对器件光学性能的影响规律等方面探索基础理论，解决其中涉及的关键科学问题和技术难题，从而为高性能复眼透镜跨尺度三维结构的高效制造发展一种原创性的工艺方法。

中文关键词： 人工复眼透镜；跨尺度结构；微纳制造；激光加工；纳米压印

英文摘要： To obtain an ideal artificial compound eyes with panoramic field of view and superior weak light detection performance, and solve the problem of fabrication of high quality artificial compound eyes with three-dimension structures, in this project, a novel way fabricate secondary structures firstly, then fabricate primary structures is proposed, and the high-efficiency fabrication of ideal artificial compound eyes with nano-micro-macro- hierarchical structures can be achieved by using nanoimprint, laser swelling and replication process with air pressure. In this process, a large number of difficult-to-machine secondary structures are fabricated by planar process, then the planar substrate with secondary structures becomes curved surface by the whole deformation to obtain primary structures. Therefore, this process overcomes the low-efficiency and structural imperfection in traditional fabrication techniques of curved hierarchical structures, can control precisely all levels of structures characteristics of artificial compound eyes, which provides a powerful support for the optimization of high-performance artificial compound eye devices. Research contents in this project include: laser swelling mechanism under the action of flexible constraints, the effect of substrate curved deformation on surface micro-/nano- structure characteristics, as well as the influence of size, shape and distribution of hierarchical structures on the optical property of artificial compound eyes. This project aims to develop a novel nano-micro-macro- hierarchical structures forming method, which can fabricate the high performance artificial compound eyes high-efficiently.

英文关键词： Artificial compound eyes;Multiscale structures;Micro-/nano-fabrication;Laser fabrication;Nanoimprinting