三维可控探针纳米加工系统及其关键技术研究

项目名称： 三维可控探针纳米加工系统及其关键技术研究

项目编号： No.51275337

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 张大卫

作者单位： 天津大学

项目金额： 85万元

中文摘要： 纳米结构和器件在机械、物理和化学性能方面具有独特优势，已初步成功应用在微机械系统、传感、通信、医疗和日常生活等领域。面向纳米结构和器件的加工与制造技术业已成为国际精密工程和纳米技术的前沿课题。本项目密切结合基于探针刻划方法的"自顶向下"纳米制造重大需求，研究三维可控纳米结构和器件加工系统的机械结构优化设计理论，开发高可靠性和可控性的机械纳米加工原理与样机技术，构建所开发机构的运动学与动力学模型，研究微/纳切削力的传感、测量和控制新方法，建立基于高性能数字信号处理方法的数控系统搭建技术，探讨保障三维纳米结构和器件的加工精度和质量的工艺方法。该项研究不仅对提高我国纳米制造技术水平具有重要的理论价值和工程实践意义，而且还具有广阔的应用前景。

中文关键词： 三维纳米结构；纳米加工系统；电磁致动；运动学；

英文摘要： Nano-structures and devices have unique advantages in the aspects of mechanical, physical and chemical properties, which have been successfully utilized in the fields of MEMS, sensing, communication, medical and daily life. Fabrication of nano-structures has been becoming the leading-edge research in precision engineering and nanotechnology. Aiming at the requirements of tip-based nanofabrication, this research will investigate the mechanical design optimization theory of 3D nano-structure controllable machining system. The reliable and accurate nano-fabrication principle and prototype technique will be firstly investigated, and then the kinematics and dynamics of the proposed mechanism will be developed. Further, the sensing, measurement and control methodologies of micro/nano- cutting force will be explored. Accordingly, a DSP-based control system will be established. Finally, the nano-fabrication techniques for improving machining accuracy and quality will be performed. This research not only establishes the key enabling techniques underpinning the fields of nanotechnology and further improves the nano-fabrication level of China, but also provides great potential applications in scientific and engineering areas.

英文关键词： 3D nano-structure；nano-machining system；electromeganetic actuation；kinematic modelling；