表面等离子体共振的椭偏测量与超薄介质层表征

项目名称： 表面等离子体共振的椭偏测量与超薄介质层表征

项目编号： No.11304328

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 方明

作者单位： 中国科学院上海光学精密机械研究所

项目金额： 30万元

中文摘要： 金属表面超薄介质层(d<10nm)的界面性能改进和光学常数的精确获取对于微电子、光学和空间技术进步有着重要的意义。表面等离子体共振和偏振光反射这两个物理过程对薄膜界面及附近特征非常敏感，本申请拟集成两者的优点，运用椭圆偏振位相测量技术精确表征金属与超薄介质层界面上的表面等离子体共振现象。通过搭建弯曲Otto结构的受抑全反射椭偏测试平台，使其适用于观察和表征超薄固态薄膜界面的表面等离子体，实现偏振态信息对界面状态的高精度、高准确性测试。理论构建表面等离子体态对界面介电常数空间分布关系模型及偏振光对表面等离子体共振态的响应模型，实现反演运算，提取界面特征信息，并确保解的准确性和高精度。该工作将结合测试平台，侧重从理论方法上建立起高效、无损的超薄薄膜(d<10nm)光学常数与界面微结构光学表征方法和流程。相关研究结果将推动高精密薄膜元器件的表征与精确控制能力。

中文关键词： 表面等离子体共振；椭偏测量；超薄薄膜；光学表征；

英文摘要： For ultra thin oxides (d<10nm) on metals, interface performance improvement and optical constant precise determination are critical for microelectronic, integrated optics and aerospace technology. The scientific problem is how to determine precisely the optical and morphological properties of oxides (refractive index n\extinction coefficient k\defects\ interface roughness\ interface adherence quality) when the film thickness is as low as 10nm or less. The key problems: high precision determination of optical constants and thickness of ultrathin films; non-destructivity of the approach; algorithm for mathematical processing of the measurement data. In this project we propose construction of a novel instrument and method which would profit of polarized light reflection and surface plasmon resonance simultaneously which both techniques are very sensitive but use two different physical phenomena, yielding hence two independent sources of information. A platform based on curved Otto configuration frustrated total reflection and ellipsometry is designed and under construction to phase measuring the state of surface plasmon resonance on the interface of metal and ultra thin solid film. Models of relationship between dielectric constant distribution and surface plasmon state and response of polarized light to the surf

英文关键词： Surface Plasmon resonance；Ellipsometry；Ultra-thin film；Optical Characterization；