基于磁流变效应柔性夹持超薄钛酸锶电子陶瓷基片精密磨粒加工研究

项目名称： 基于磁流变效应柔性夹持超薄钛酸锶电子陶瓷基片精密磨粒加工研究

项目编号： No.51305082

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 潘继生

作者单位： 广东工业大学

项目金额： 26万元

中文摘要： 钛酸锶电子陶瓷由于独有的高介电常数成为高性能电子元器件和微波电路基板的核心材料，随着应用需求的发展，需要钛酸锶陶瓷基片尺寸达到2英寸厚度小到0.1mm并具有光滑平坦表面（Ra≤0.01μm），但是钛酸锶陶瓷本身决定了其毛坯具有"薄、软、脆、翘"的特征，难以有效加工。基于前期研究，提出采用磁流变效应的柔性夹持解决装夹和加工过程中的基片破碎问题，应用集群磁流变高效研磨快速去除基片毛坯面的凹凸不平和翘曲，利用真空吸附和集群磁流变低损伤平面抛光获取高质量光滑平坦表面的工艺方法。对磨粒加工过程中的毛坯柔性夹持、位置自动调整机制、材料应力与变形控制、亚表面损伤、材料脆塑性去除模式转换、表面形成机理、加工效率和表面完整性等进行系统研究，形成磁流变效应柔性夹持理论，揭示钛酸锶电子陶瓷基片在集群磁流变研抛作用下的材料去除机理，实现大尺寸超薄软脆电子陶瓷基片的零破碎高效加工，促进电子陶瓷材料及元器件的发展。

中文关键词： 钛酸锶；平坦化；抛光；磁流变；动态磁场

英文摘要： Strontium titanate electronic ceramic is the key material of electronic components such as high-performance chip capacitors and microwave circuit boards due to the unique high dielectric constant. With the development of its applications, the 2 inch strontium titanate ceramic substrate need to get smooth and flat surface, whose thickness reaches up to 0.1mm and roughness smaller than 0.01μm. However, it is difficult to be processed because the characteristic of ultrathin, soft, brittle and warp. Base on the earlier research, we propose a new technological method，which use the magneteroheogical effect(MR effect) flexible fixturing technology to solve the fragmentation problem during fixturing and machining, remove the uneven and warp surface quickly by use the MR effect flexible fixturing and the cluster MR effect high efficiently lapping technology, then get the high quality smooth and flat surface by use vacuum adsorption and cluster MR effect low scathe plane polishing technology. The project carry out systematic research on the abrasive machining of rough substrate in the aspects of flexible fixturing, position automatic adjustment mechanism, material stress & deformation control, subsurface damage, material ductile-brittle removal pattern transform, surface formation mechanism, machining efficiency, surface

英文关键词： Strontium titanate (SrTiO3)；Planarization；Polishing；Magnetorheological effect；Dynamic magnetic fields