压电式MEMS仿生结构矢量水声传感机理及其器件基础研究

项目名称： 压电式MEMS仿生结构矢量水声传感机理及其器件基础研究

项目编号： No.51275492

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 甄国涌

作者单位： 中北大学

项目金额： 80万元

中文摘要： 高灵敏微型矢量水听器应用前景广泛且需求迫切，是现代声呐系统前沿技术的重要发展方向。本项目在前期二维指向性压阻式MEMS矢量水听器研究基础上，提出一种压电式仿生MEMS无源器件基础结构的水声传感探测新方法，为实现超低频、远距离弱信号水下声目标的高灵敏探测、识别与定向提供一种新思路。系统研究揭示基于串联压电功能薄膜敏感单元的四悬臂梁－质量块纤毛仿生MEMS结构的声压信号拾取与矢量水声传感机理；实现具有高动态探测范围、低功耗和噪声低、微小型化优势的压电式MEMS仿生结构矢量水听器一体化集成制造，研究压电式MEMS仿生矢量水听器无源器件三维空间感知信号的可靠提取方法，建立矢量水听器对水声目标在x、y、z方向三维空间的指向数学关系和定向理论，解决现有单个矢量水听器不能同时实现三维空间定向的技术难题，为新型压电式MEMS仿生矢量水听器的开发应用提供基础理论指导和关键技术支持。

中文关键词： 压电效应；仿生结构；MEMS；水声传感器；

英文摘要： The vector hydrophone with high sensitiveness and micro-miniature is very important to the development of sonar system. The application prospects and urgent demand of the vector hydrophone is extensive. On the basis of two-dimensional piezoresistive MEMS vector hydrophone, a new passive piezoelectric MEMS bionic vector hydrophone to detect acoustic sensing underwater is proposed, which can achieve high sensitive detection, identification and orientation for ultra-low frequency and long-distance weak signal acoustic target underwater. The research reveals the measuring pressure theory and MEMS bionic vector hydrophone sensing mechanism with four cantilever beams-mass based on the serial sensitive units of piezoelectric functional thin films. The integration manufacture method of piezoelectric MEMS bionic vector hydrophone with high dynamic detection range, low power consumption and noise, miniaturization is investigated. And the reliable method for extracting three-dimensional acoustic signal of piezoelectric MEMS bionic vector hydrophone is studied. The mathematical relationship and orientation theory of vector hydrophones on the x, y, z three-dimensional direction of underwater acoustic target is established. The technical problem of single vector hydrophone without simultaneously achieving three-dimensional or

英文关键词： piezoelectric effect；bionic structure；MEMS；acoustic sensor；