项目名称: 低熔点金属及合金薄膜液态光学性质的实验和理论研究
项目编号: No.61575048
项目类型: 面上项目
立项/批准年度: 2016
项目学科: 无线电电子学、电信技术
项目作者: 郑玉祥
作者单位: 复旦大学
项目金额: 16万元
中文摘要: 金属薄膜在信息领域中应用广泛,如用作导电膜、存储膜等,随着器件尺度减小,金属的熔点下降,当器件在一些高温环境应用时,金属薄膜将熔融甚至液化,但目前关于金属薄膜液态性质的研究仍很有限,因此研究有关液态金属及合金材料的微观结构、光学性质,以及固/液相变化过程的规律具有科学意义和应用价值。本项目拟通过采用电子束蒸发等工艺,在真空条件下制备系列低熔点金属(如Sn、In)膜及其合金膜样品;采用X-射线衍射、原子力显微镜等方法表征所制备的金属膜及合金膜的物理性质及结构特性;采用变温椭圆偏振光谱技术获取固相及液相金属膜及合金膜的光学常数谱;并结合第一性原理计算来研究低熔点金属Sn、In等及其合金的液态光学性质以及固/液相变特性和物理机制,通过对这些较低熔点的金属及合金的研究,探索液态金属的光学性质及相变特性,为进一步研究其它高熔点金属的液态光学性质提供具有参考价值的技术方法和理论模型。
中文关键词: 光学薄膜;金属薄膜;金属微纳结构;椭偏光谱;光学性质
英文摘要: Metal thin films are extensively used in the field of information technology, such as conductive films, information storage films, etc. With size decreasing of devices, the melting points of metal thin films may decrease, and it leads to the melting or liquefaction of metal films in the devices. However, the research on the optical properties of films of liquid metals and alloys is still very limited, so it is important to carry out the study focusing on the microstructure, optical properties of liquid metals and the mechanism of the solid / liquid phase change process. The project under application aims at discovering the relations between the optical properties of liquid metals and the microstructures existing in the liquid metals or alloys. The samples of metal or alloy films will be prepared by using electron beam evaporation or ion beam sputtering process. All samples will be further characterized by X-ray diffraction, and atomic force microscopy method. The spectra of optical constants of all samples will be obtained by using spectroscopic ellipsometry. The first principle calculation will be applied to study the optical properties and the solid/liquid phase change characteristics and physical mechanism. The results of this study will form a basement and be a referenc for further study for metals of high m
英文关键词: Optcal thin films;Nano metal thin films;Micro/nano structures of metals;Spectroscopic ellipsometry;Optical properties