单片集成旋转谐振式微型三维电场传感器研究

项目名称： 单片集成旋转谐振式微型三维电场传感器研究

项目编号： No.61201078

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 电子学与信息系统

项目作者： 方东明

作者单位： 中国科学院电子学研究所

项目金额： 27万元

中文摘要： 本项目对单片集成旋转谐振式微型三维电场传感器进行结构设计、理论分析、实验工艺和测试技术等进行研究。传感器X和Y方向电场测量单元采用旋片式屏蔽感应结构，Z方向电场测量单元采用扇形梳齿结构，充分结合差分激励、差分敏感的结构布置方式，设计出独特的器件结构，综合运用仿真和参数优化技术，理论分析传感器的静态和动态特性，利用IC工艺兼容的三维微机械加工技术，在硅衬底上制作出微型三维电场传感器，实现三维电场测量的微型化和批量化制造，设计并开发传感器的弱信号检测技术，抑制传感器的串扰耦合和共模噪声，解决三维电场测量的关键难题，为实现面向大气电场探测、雷电预警、智能电网等应用的集成通用三维电场测量装置研制提供良好技术基础，满足矢量电场探测装置的微型化、低功耗、低成本、批量化等更高应用需求。

中文关键词： 微型电场传感器；三维电场；微机电系统；；

英文摘要： This project gives investigation on the structure design, theoretical analysis, fabrication process and measuring technique of the monolithically integrated rotary resonant micro 3-D electric field sensor (EFS). The X and Y direction electric field measuring unit adopt rotator shield structure, while Y direction electric field measuring unit adopts sectorial comb structure. The sensor fully combines the array of structures of differential excitation and differential sense, to form a novel unique device structure. We will synthetically carry out simulation and parameters optimization, fabricate micro 3-D EFS on Si substrate, and realize the micromation and batch fabrication of 3-D EFS. Meanwhile, we will design and develop the technology of detecting the feeble signal of the sensor, to suppress the crosstalk coupling and common-mode noise, solve the key problems of measuring 3-D electric field. This project will supply fine base research technique to the research and development of the integrated universal 3-D electric field measurement equipment orienting to the application fields of atmospheric electric filed detecting, thunderstorm prewarning, smart grid, to satisfy high level application requirement of the vector electric field measurement equipment, such as miniaturization, low power consumption, low cost, b

英文关键词： electric field micro sensor；three-dimensional electric field;；MEMS；；