基于光栅干涉相位扫描的虚拟亚纳米光栅尺超精密定位检测与控制方法的理论与实验研究

项目名称： 基于光栅干涉相位扫描的虚拟亚纳米光栅尺超精密定位检测与控制方法的理论与实验研究

项目编号： No.51275306

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 时轮

作者单位： 上海交通大学

项目金额： 72万元

中文摘要： 超精密位移检测是超精密定位系统的核心技术，应用涉及几乎所有高技术领域，正向亚纳米级测量分辨率快速发展，研究成果能体现国家的综合科技实力。 项目提出基于光栅干涉相移的位移检测方法，通过对微米测量分辨率光栅干涉信号相位的移动，获得亚纳米级分辨率的测量信号，在此基础上，面向纳米定位闭环反馈控制，提出虚拟亚纳米光栅尺的概念，通过多次移动扫描，主动获取亚纳米分辨率双向位移反馈信号。通过理论分析建立系统模型，构建基于光栅干涉相位移动扫描检测的虚拟亚纳米光栅尺定位控制理论体系，通过实验进行验证，获得0.1nm位移分辨率的检测结果。 项目研究的检测方法与传统的直接利用测量元件自身物理精度进行测量的检测方式相比，可利用微米级分辨率的测量元件实现亚纳米级分辨率的位移检测，虚拟亚纳米光栅尺的检测方式也不同于传统的被动位移检测，是一种主动检测方法，具有重要的理论价值和实际意义。

中文关键词： 光栅；位移测量分辨率；虚拟光栅尺；相移；

英文摘要： Ultra precision measuring for displacement is the core technology of ultra precision positioning system and is applied in almost all hi-tech fields. The research orientation is leaded to sub-nanometer resolution measuring field and the research production will reflect greatly to the whole technology power of a country. The phase moving method for displacement measuring is suggested in this subject. The principle of it is acquiring the sub-nanometer placement signals by moving the receiving position of the sensor that transfers the grating signal to electronic signal. Basing on the phase moving method, virtual grating with sub-nanometer resolution power is presented aiming at close-loop positioning control system. Its principle is acquiring the sub-nanometer placement signals built-in direction information by multi-moving the receiving position of the sensor. Based on the grating phase moving method, the virtual grating control theory system is developed. Many experiments will be done to verified the new theory and the resolution of the displacement measuring is expected to achieving to 0.1nm by using the new methods. Comparing with the traditional measuring methods, the developed displacement measuring system gets the ability of sub-nanometer resolution by grating interferometer with micrometer resolution power

英文关键词： Grating；Resolution of displacement measurement；Virtual grating；Phase-shift；