光学自由曲面共轭差分虚拟干涉测试技术基础研究

项目名称： 光学自由曲面共轭差分虚拟干涉测试技术基础研究

项目编号： No.61205162

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 马骏

作者单位： 南京理工大学

项目金额： 26万元

中文摘要： 由于面形不规则性而造成的光学自由曲面检测难题是制约其应用的关键问题之一。"虚拟干涉术"可以利用三次波前传感器错位测试结果进行数值运算，获取波面微分数据，再利用波面复原技术实现对待测件面形数据的重建。但是该技术是建立在反射光小发散度的基础上，并且错位测试必须在准直光路中进行，因此无法将该技术直接利用于对光波有发散作用的光学自由曲面的检验中。本项目对虚拟干涉术进行改进，提出"共轭差分虚拟干涉法"，融入波面控制及共轭差分技术，在控制波面发散度的同时，采用围绕中心的对称共轭错位测试法，实现光学自由曲面检验目的。项目研究内容包括：(1)共轭差分虚拟干涉测试法的设计及优化；(2)利用空间光调制器实现反射光波的收敛；(3)利用波面差分数据复原获得合成相位；(4)合成相位分项标定提取待测面形。通过不同类型光学自由曲面的测试研究，进一步优化共轭差分虚拟干涉测试方法，为解决光学自由曲面检验问题提供技术基础。

中文关键词： 光学自由曲面；；虚拟干涉术；；波面复原；；；

英文摘要： Because of the irregularity, the optical free-form surface test is one of the serious problems that limit the application of itself. Virtual interferometry is the technique that based on the numerical calculation of three measurement results with small shifts using wavefront sensor. And then it gives the differential data of the surface under test that can be retrieved with wavefront reconstruction technique. However, this Virtual Interferometry is based on the small divergence of the reflection wavefront. And it is necessary to carry out the shifting tests with the collimated wavefront incidence. Therefore, it is impossible to directly use this technique for the measurement of optical free-form surface. Conjugate Differential Virtual Interferometry is proposed in this project, which is especially for the freeform surface test. It combines the original Virtual Interferometry with wavefront manipulation techniques together. And it also contains the conjugate differential technique that is the symmetric shifting tests around the central position. The research content includes: (1) the route optimization of the Conjugate Differential Virtual Interferometry (2) using spatial light modulator realize converge of the reflection wavefront (3) obtaining the synthetic phase from the reconstruction of the wavefront (4) ret

英文关键词： optical freeform surface;；virtual interferometry;；wavefront reconstruction；；