超声椭圆振动磨削的光学非球面亚表面损伤抑制及其对中频误差的影响机制

项目名称： 超声椭圆振动磨削的光学非球面亚表面损伤抑制及其对中频误差的影响机制

项目编号： No.51475310

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 姜晨

作者单位： 上海理工大学

项目金额： 80万元

中文摘要： 光学非球面超精密加工技术一直受加工效率的制约，由于超声振动在脆硬性材料加工方面的优势，将其应用于光学玻璃非球面精密磨削加工是一种极具吸引力的技术改良，但该加工方式对光学元件极为关注的亚表面损伤和中频误差的影响规律尚不明确。本课题以超声椭圆振动磨削下光学玻璃非球面元件亚表面损伤机理为研究对象，探索亚表面损伤抑制过程中工艺参数对中频误差的影响机制。首先研究高频脉冲磨削力对磨粒压痕应力场的影响，掌握亚表面裂纹与残余应力初始形成机理；其次研究非球面加工轨迹拐点处裂纹尖端应力应变耦合作用关系，掌握磨削过程亚表面裂纹与残余应力相互影响的扩展规律；然后建立中频误差磨削参数预测模型，掌握中频误差与亚表面损伤的内在联系；最后通过实验研究获得低亚表面损伤和中频误差的控制方法。本研究可为光学非球面超声振动磨削表面/亚表面质量控制方法研究奠定理论基础，推动光学非球面精密制造技术发展，具有重要的理论和实践指导意义。

中文关键词： 光学玻璃；非球面；超声振动磨削；亚表面损伤；中频误差

英文摘要： The application and development of optical aspheric glass lens are restricted by the efficiency of traditional ultra precision manufacturing technology of optical aspheric lens. Ultrasonic technology is applied to the precision grinding of the optical aspheric glass according to its superiority. However, the mechanisms of subsurface damage and mid-spatial-frequency error on optical aspheric glass lens in this machining method are not clear. The generation mechanisms of the subsurface damages on the optical glass, including subsurface crack and subsurface residual stress, are researched to explore the influence relationship between the subsurface damage and the mid-spatial-frequency error in terms of grinding parameters. Firstly, the generation mechanisms of the subsurface crack and subsurface residual stress are modeled for the elliptical ultrasonic assisted grinding. Secondly, the effects of aspheric machining path on the subsurface crack and the subsurface residual stress are analyzed and the growth of subsurface damage is modeled. Thirdly, the mid-spatial-frequency error of the optical aspheric lens in the elliptical ultrasound assisted grinding is modeled to explore the internal relation between the subsurface damage and the mid-spatial-frequency. Finally, the processing control technologies of the subsurface damage and the mid-spatial-frequency error of the optical aspheric lens in the elliptical ultrasound assisted grinding are researched by a series of machining and detecting experiments. This research can be used as basic theory of the surface/subsurface qualities of optical aspheric glass in ultrasound assisted grinding and improve the technology of precision manufacture of the optical aspheric lens. It has great theoretical and practical significance.

英文关键词： Optical glass;Aspheric parts;Ultrasionic assisted grinding;Subsurface damage;Mid-spatial-frequency error