基于液滴外延技术制备无应力纳米光电红外探测器的研究

项目名称： 基于液滴外延技术制备无应力纳米光电红外探测器的研究

项目编号： No.61204060

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 巫江

作者单位： 电子科技大学

项目金额： 28万元

中文摘要： 通过液滴外延生长方法生成无应力的化合物半导体纳米材料，并利用透射电子显微镜，X射线衍射仪，原子力学显微镜，光致发光光谱等测定材料生长质量并研究液滴生长机理。利用改变控制纳米液滴晶化过程等办法，实现液滴外延可控生长，并制备高质量的无应力纳米材料。在优化材料质量的基础上，结合量子点红外探测器的制备工艺，研制新型无应力光电红外探测器，以期解决传统量子点红外探测器量子效率低的问题。并通过研究新材料体系的液滴外延生长，制备具有新器件结构的红外探测器，实现多色高性能光电红外探测器。通过系统地测量器件暗电流，光响应率，噪声等手段，深入研究基于无应力纳米材料光电红外探测器的性质。本研究将为应用液滴外延生长方法研制第三代高性能红外探测器奠定实验基础。

中文关键词： 纳米材料；红外；探测器；半导体；

英文摘要： Coumpound semiconductor nanomaterials will be grown by droplet epitaxy technique. These nanomaterials will be analyzed by using TEM, XRD, AFM, and PL techniques in order to monitor the material quality as well as understand the growth mechanism. By varying and control the conditions of crystallization process of nano droplets, this project will achieve nanomaterial ordering and strain-free nanomaterials with high quality by using droplet epitaxy. Based on high quality epitaxial materials and mature fabrication techniques of quantum dot infrared photodetectors, the project will study strain-free infrared photodetectors in order to solve the low quantum efficiency issue of quantum dot infrared photodetectors.Moreover, by studying new material systems using droplet epitaxy, the project will fabricate infrared photodetectors with novel device structures and realize high performance multicolor infrared photodetectors.Through systematic measurements of the dark current, responsivity, and noise of the photodetectors, the project will thoroughly study the physical properties of the photodetectors based on strain-free nanomaterials. The project will pave the way for development of the third generation high performance infrared photodetectors by employing the droplet epitaxy growth technique.

英文关键词： Nanomaterials；infrared；photodetectors；semiconductors；