ECR-PLA等离子体的时空运动、激发增强和气相反应

项目名称： ECR-PLA等离子体的时空运动、激发增强和气相反应

项目编号： No.10875029

项目类型： 面上项目

立项/批准年度： 2009

项目学科： 无线电电子学、电信技术

项目作者： 吴嘉达

作者单位： 复旦大学

项目金额： 35万元

中文摘要： 低温等离子体在材料领域的应用日益广泛，应用技术的发展又促进了等离子体基本过程和特性的研究。本项目研究对象为ECR微波放电和脉冲激光烧蚀联合作用下所引发的ECR-PLA等离子体，包括ECR-PLA等离子体的时空运动和激发增强以及发生在等离子体中的气相反应，并探索这一等离子体在材料制备上的应用。通过时空分辨和积分的等离子体光谱测量考察了ECR-PLA等离子体的时空运动，用等离子体光谱分析识别等离子体成分，并结合时空分辨测量、光谱拟合和温度估算，考察了等离子体及其成分的空间分布和时间演变，进而研究了等离子体的激发特性和发生在等离子体中的气相反应。研究结果表明：高速膨胀的瞬变PLA等离子体和稳定均匀的ECR等离子体间的相互作用使得ECR等离子体不再保持其稳定均匀性；PLA等离子体和ECR等离子体彼此间的相互激发导致ECR-PLA等离子体的激发增强，使得其激发程度和活性远远高于ECR等离子体和PLA等离子体；高活性的ECR-PLA等离子体中的活性粒子之间易于发生高速率的气相反应；性能独特的ECR-PLA等离子体在材料制备上具有独到的效果。在项目执行期间已取得发表SCI论文11篇及其它研究成果。

中文关键词： ECR-PLA等离子体；电子回旋共振微波放电；脉冲激光烧蚀；激发增强；气相反应

英文摘要： Low-temperaure plasmas have found wide applications in the field of materials science and technology. The development of technical applications and the exploration of new applications of low-tempeature plasmas are inversely promoting the research on the basic processes and characteristics of low-tempeature plasmas. This project is to study the ECR-PLA plasma generated by the co-action of ECR microwave discharge and pulsed laser abaltion and to explore the applications of the generated ECR-PLA plasma in materials systhesis. The spatial snd temporal movement of the ECR-PLA plasma has been examined through temporally and spatially resolved and integrated plasma optical emission measurements, the plasma compositions have been identified through plasma emission analysis, and the spatial distribution and temporal evolution of the plasma and its compositions have been studied through optical emission measurements with time and space resolution together with spectrum simulation and temperature estimation, hereafter the excitation enhancement of the plasma and the gas phase reactions occurred in the plasma have been investigated. The project has drawn the following conclusions: the interations between the trasient and rapidly expanding PLA plasma and the steady and uniform ECR plasma make the latter also vary with time and space; the inter-excitation between the ECR plasma and the PLA plasma results in the excitation enhancement of the ECR-PLA plasma, leading to the excitation and the reactivity of the ECR-PLA plasma much higher than those of both the ECR plasma and the PLA plasma; the activated species in the highly reactive ECR-PLA plasma will experience gas phase reactions at high rates. Our results also show that the ECR-PLA plasma with unique characteristics has unique effects in the applications of materials synthesis. During the implementation of the project, research results have obtained including 11 SCI papers.

英文关键词： ECR-PLA plasma; electron cyclotron resonance microwave discharge; pulsed laser ablation; excitation enhancement; gas phase reaction