NSRL光谱辐射标准和计量线偏振性和光谱纯度研究

项目名称： NSRL光谱辐射标准和计量线偏振性和光谱纯度研究

项目编号： No.U1332130

项目类型： 联合基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 周洪军

作者单位： 中国科学技术大学

项目金额： 66万元

中文摘要： 建立Au-Si-Au三镜反射兼俱高次谐波抑制的偏振仪，提高入射光的偏振性和定量测量NSRL计量站同步辐射偏振性，为极紫外偏振光学元件研究提供基础。利用高线密度透射光栅定量研究计量线的高次谐波分布，定量研究计量线所覆盖的5-140nm波段不同滤片材料和同一材料不同厚度滤片对高次谐波的抑制作用，研究三镜反射偏振仪对45-120nm高次谐波的抑制作用。为5-140nm波段探测器定标和光学元件性能测试提供高纯度的光谱，以提高计量精度。 计量光束线是我国极紫外光谱计量的实验平台。同步辐射偏振性研究直接影响偏振元件的计量精度。入射的同步辐射光经光栅单色器分光后，其出射光总是伴有高次谐波。对于已经建成的光束线，要改变光学设计和现有结构来抑制高次谐波是困难的，滤片抑制高次谐波是简单和有效的；即使采用了高次谐波抑制手段，也会有残存高次谐波，为了提高光谱纯度和计量精度，需要定量研究高次谐波，以修正实验数据.

中文关键词： 同步辐射；极紫外；光谱计量；高次谐波抑制；偏振性

英文摘要： This project is to establish an Au-Si-Au triple-mirror reflection polarizer with suppression of higher-order harmonics. This polarizer has an integrated filtering effect and higher-order harmonics can be suppressed directly with the proposed polarizer in the proper energy region. Au film provides promising performance in the energy range of 10-100eV, especially the highest degree of polarization. Silicon’s cutoff edge is acts as the blocking element for higher photon energy. Quantitatively measuring polarization of SR is a base of performance research of polarization optical element, Polarization performance of SR affect the metrology accuracy of polarization optical element directly. In the wavelength range of 5-140nm, a transmission grating (TG) is used to determine the contribution of higher-order harmonics at spectral radiation standard and metrology beamline (U26) in NSRL. TG is used to quantitatively research the higher-order contribution after suppressed by different material filters and different thickness filters in the proper energy region. TG is also used to research the higher-order contribution after suppressed by the triple-mirror reflection polarizer. Suppressing higher-order effectively can provide more purity spectra for detector calibration and performance research of optical element in the reg

英文关键词： synchrotron radiation；extreme ultraviolet；spectral metrology；high-order suppressing；polarization