双频激励低气压柱状电感耦合放电等离子体的机理研究

项目名称： 双频激励低气压柱状电感耦合放电等离子体的机理研究

项目编号： No.11475038

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 任春生

作者单位： 大连理工大学

项目金额： 120万元

中文摘要： 射频放电等离子体技术一直是等离子体研究领域的一个非常重要的研究方向，目前的主要发展方向是大面积均匀与高密度等离子体，但通常情况下，这两个要求是相互矛盾的：高密度下难以达到大面积均匀，而大面积均匀下难以实现高密度。本项目采用双射频柱状电感耦合方式，以高频放电为低频放电提供点火与预电离，这样低频放电更容易产生，也更容易获得高的等离子体密度，再结合低频放电的低趋肤效应特性，有可能实现高密度等离子体下的大面积均匀分布。项目重点研究双射频驱动下放电等离子体的负载特性与功率耦合、模式跳变与回滞、放电等离子体的趋肤效应，深入了解其中的特点以及可能出现的一些新现象与新问题，并探讨其中的物理机理。

中文关键词： 气体放电；低温等离子体；感应耦合等离子体

英文摘要： Radio frequency (RF) discharge plasma is always an important direction in plasma study, and at present the main progress trendency for RF plasma is to produce high density plasma which with good uniformity in a big discharge space. However, high plasma density and good uniformity are usually incompatible. With high plasma density, then the uniformity in a big discharge space cannot be guaranteed; When the uniformity has been ensured, the plasma density usually cannot be high. In the project, we will use dual RF columnar inductively coupled plasma technology to try to overcome the above-mentioned problem: the high frequency RF discharge provides ignition and preionization for the low frequency RF discharge, then the low frequncy discharge is easy to be produced and high density plasma is easy to be obtained. When the weak skin effect for low frequncy RF discharge has been taken into consideration, the contrariety between high plasma density and good space distribution uniformity in columnar inductively coupled plasma can maybe been resolved. We will mainly study the load characteristic and power coupling, mode transition and hysteresis, and skin effect for dual frequency drived RF discharge plasma in the project. The characteristics and some new phenomena about the dual frequncy drived RF discharge will be realized deeply and the physical mechanism will be discussed.

英文关键词： Gas discharge;Low temperature plasma;Inductively coupled plasma